Generic nonlinear error compensation algorithm for phase measuring profilometry

Xin Yu; Shanshan Lai; Yuankun Liu; Wenjing Chen; Junpeng Xue; Qican Zhang

doi:10.3788/COL202119.101201

Journals >Chinese Optics Letters >Volume 19 >Issue 10 >Page 101201 > Article

Chinese Optics Letters
Vol. 19, Issue 10, 101201 (2021)

Generic nonlinear error compensation algorithm for phase measuring profilometry

Xin Yu¹, Shanshan Lai¹, Yuankun Liu^1、*, Wenjing Chen¹, Junpeng Xue^1、2, and Qican Zhang¹

Author Affiliations

¹Opto-Electronic Department, Sichuan University, Chengdu 610065, China

²School of Aeronautics and Astronautics, Sichuan University, Chengdu 610065, China

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DOI: 10.3788/COL202119.101201 Cite this Article Set citation alerts

Xin Yu, Shanshan Lai, Yuankun Liu, Wenjing Chen, Junpeng Xue, Qican Zhang. Generic nonlinear error compensation algorithm for phase measuring profilometry[J]. Chinese Optics Letters, 2021, 19(10): 101201 Copy Citation Text

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