Guanghua Yang, Yu Wang, Jing Li, Yuejing Qi, Minxia Ding. Diffraction Efficiency of Enhanced Phase Grating[J]. Acta Optica Sinica, 2021, 41(12): 1205001
- Acta Optica Sinica
- Vol. 41, Issue 12, 1205001 (2021)
Fig. 1. Structures of phase grating. (a) Structure of standard phase grating; (b) structure of segmented phase grating
Fig. 2. Diffraction efficiency of 0th-9th order signals as a function of groove depth. (a) Zero order; (b) odd diffraction orders; (c) even diffraction orders
Fig. 3. Diffraction efficiency of zero order as a function of duty ratio
Fig. 4. Diffraction efficiency of 1st-9th order signals as a function of f2. (a) Odd diffraction orders; (b) even diffraction orders
Fig. 5. Diffraction efficiency of 0th-9th order signals as a function of position of grating ridge. (a) Odd diffraction orders; (b) even diffraction orders
Fig. 6. Diffraction efficiency of 0th order signal as a function of groove depth and duty ratio
Fig. 7. Phase grating structure without even diffraction orders and its characteristic. (a) Phase grating structure without even diffraction orders; (b) first half-period structure and second half-period structure are complementary
Fig. 8. Enhanced phase grating structure with 180° rotational symmetry and without zero and even diffraction orders
Fig. 9. Grating structure with zero and even order diffraction missing when N=3
Fig. 10. Ehanced grating structure without zero and even diffraction orders when N=5
Fig. 11. Diffraction efficiency of odd diffraction orders as a function of f1
Fig. 12. Optimized grating structure when number of ridges N=3. (a) Evaluation function W as a function of f1; (b) structure of IME3
Fig. 13. Diffraction efficiency of odd diffraction order signals as a function of f1 and f2. (a) 1st diffraction order; (b) 3rd diffraction order; (c) 5th diffraction order; (d) 7th diffraction order; (e) 9th diffraction order
Fig. 14. Optimized grating structure when number of ridges N=5. (a) Evaluation function as a function of f1 and f2; (b) structure of IME5
Fig. 15. Structures of phase grating in a period. (a) AH11; (b) AH53
Fig. 16. Diffraction results of each structure obtained by rigorous coupled-wave analysis method for TM polarization illumination. (a) AH11; (b) AH53; (c) IME3; (d) IME5
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Table 1. Structural parameters of phase grating without zero and even order diffraction
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Table 2. Diffraction efficiency of phase grating without zero and even order diffraction
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Table 3. Structural parameters of IME3
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Table 4. Structural parameters of IME5
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Table 5. Comparison of diffraction efficiency of each structure calculated by using RCWA and scalar diffraction theory%
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