• Infrared and Laser Engineering
  • Vol. 51, Issue 3, 20210360 (2022)
Sanyong Deng1, Song Yue2, Dongliang Zhang1, Zhaojun Liu1, Huiyu Li1, Yuan Liu1, Zichen Zhang2, and Lianqing Zhu1
Author Affiliations
  • 1Beijing Information Science and Technology University, Beijing 100192, China
  • 2Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
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    DOI: 10.3788/IRLA20210360 Cite this Article
    Sanyong Deng, Song Yue, Dongliang Zhang, Zhaojun Liu, Huiyu Li, Yuan Liu, Zichen Zhang, Lianqing Zhu. Design of solid-immersion infrared metalens[J]. Infrared and Laser Engineering, 2022, 51(3): 20210360 Copy Citation Text show less
    Design of the metalens. (a) Working principle of the metalens and schematic diagram of the structural unit; (b), (c) Top view and side view of the structural unit, respectively, where period P, diameter D and height H of the dielectric cylinder is marked
    Fig. 1. Design of the metalens. (a) Working principle of the metalens and schematic diagram of the structural unit; (b), (c) Top view and side view of the structural unit, respectively, where period P, diameter D and height H of the dielectric cylinder is marked
    Phase response of the structural unit as a function of period P and diameter D of the dielectric cylinder at the operating wavelengths of (a) 3 μm, (b) 4 μm and (c) 5 μm, respectively. Transmittance of energy flow as a function of period P and diameter D of the dielectric cylinder at the operating wavelengths of (d) 3 μm, (e) 4 μm and (f) 5 μm, respectively. Phase coverage and average transmittance of energy flow at (g) 3 μm, (h) 4 μm and (i) 5 μm operating wavelengths, respectively, when the diameter D changes within the allowable range under different period P of the structural unit(a) 3 μm、(b) 4 μm和(c) 5 μm工作波长下结构单元相位随周期P和介质柱直径D的变化;(d) 3 μm、(e) 4 μm和(f) 5 μm工作波长下能流透过率随周期P和介质柱直径D的变化;(g) 3 μm、(h) 4 μm和(i) 5 μm工作波长下,取不同的周期P,当直径D在允许范围内变化时,对应的结构单元相位覆盖范围和平均能流透过率
    Fig. 2. Phase response of the structural unit as a function of period P and diameter D of the dielectric cylinder at the operating wavelengths of (a) 3 μm, (b) 4 μm and (c) 5 μm, respectively. Transmittance of energy flow as a function of period P and diameter D of the dielectric cylinder at the operating wavelengths of (d) 3 μm, (e) 4 μm and (f) 5 μm, respectively. Phase coverage and average transmittance of energy flow at (g) 3 μm, (h) 4 μm and (i) 5 μm operating wavelengths, respectively, when the diameter D changes within the allowable range under different period P of the structural unit (a) 3 μm、(b) 4 μm和(c) 5 μm工作波长下结构单元相位随周期P和介质柱直径D的变化;(d) 3 μm、(e) 4 μm和(f) 5 μm工作波长下能流透过率随周期P和介质柱直径D的变化;(g) 3 μm、(h) 4 μm和(i) 5 μm工作波长下,取不同的周期P,当直径D在允许范围内变化时,对应的结构单元相位覆盖范围 和平均能流透过率
    Phase response of the structural unit as a function of height H and diameter D of the dielectric cylinder at the operating wavelengths of (a) 3 μm, (b) 4 μm and (c) 5 μm, respectively. Transmittance of energy flow as a function of height H and diameter D of the dielectric cylinder at the operating wavelengths of (d) 3 μm, (e) 4 μm and (f) 5 μm, respectively. Phase coverage and average transmittance of energy flow at (g) 3 μm, (h) 4 μm and (i) 5 μm operating wavelengths, respectively, when the diameter D changes within the allowable range under different height H of the structural unit(a) 3 μm、(b) 4 μm和(c) 5 μm工作波长下结构单元产生的相位随介质柱高度H和直径D的变化;(d) 3 μm、(e) 4 μm和(f) 5 μm工作波长下能流透过率随介质柱高度H和直径D的变化;(g) 3 μm、(h) 4 μm和(i) 5 μm工作波长下,取不同的介质柱高度H,当直径D在允许范围内变化时,对应的结构单元相位覆盖范围和平均能流透过率
    Fig. 3. Phase response of the structural unit as a function of height H and diameter D of the dielectric cylinder at the operating wavelengths of (a) 3 μm, (b) 4 μm and (c) 5 μm, respectively. Transmittance of energy flow as a function of height H and diameter D of the dielectric cylinder at the operating wavelengths of (d) 3 μm, (e) 4 μm and (f) 5 μm, respectively. Phase coverage and average transmittance of energy flow at (g) 3 μm, (h) 4 μm and (i) 5 μm operating wavelengths, respectively, when the diameter D changes within the allowable range under different height H of the structural unit (a) 3 μm、(b) 4 μm和(c) 5 μm工作波长下结构单元产生的相位随介质柱高度H和直径D的变化;(d) 3 μm、(e) 4 μm和(f) 5 μm工作波长下能流透过率随介质柱高度H和直径D的变化;(g) 3 μm、(h) 4 μm和(i) 5 μm工作波长下,取不同的介质柱高度H,当直径D在允许范围内变化时,对应的结构单元相位覆盖范围 和平均能流透过率
    Transmittance of energy flow and phase response of the optimal structural unit at the operating wavelengths of (a) 3 μm, (b) 4 μm and (c) 5 μm (The size of the optimal structural unit at corresponding design wavelengths are marked in the insets)
    Fig. 4. Transmittance of energy flow and phase response of the optimal structural unit at the operating wavelengths of (a) 3 μm, (b) 4 μm and (c) 5 μm (The size of the optimal structural unit at corresponding design wavelengths are marked in the insets)
    The focusing performance of the metalens in the x-z plane at operating wavelengths of 3 μm, 4 μm and 5 μm. (a) λd = 3 μm,f = 98.4 μm, the focusing efficiency is 70.7%; (b) λd = 4 μm,f = 97.7 μm, the focusing efficiency is 70.5%; (c) λd = 5 μm, f = 97 μm, the focusing efficiency is 70.4%; (d)-(f) Normalized energy flow distribution along the x direction at the focal plane (white dotted line in the figure) at the operating wavelengths of 3 μm, 4 μm and 5 μm, and the full width at half-maximum (FWHM) of the focus is marked
    Fig. 5. The focusing performance of the metalens in the x-z plane at operating wavelengths of 3 μm, 4 μm and 5 μm. (a) λd = 3 μm,f = 98.4 μm, the focusing efficiency is 70.7%; (b) λd = 4 μm,f = 97.7 μm, the focusing efficiency is 70.5%; (c) λd = 5 μm, f = 97 μm, the focusing efficiency is 70.4%; (d)-(f) Normalized energy flow distribution along the x direction at the focal plane (white dotted line in the figure) at the operating wavelengths of 3 μm, 4 μm and 5 μm, and the full width at half-maximum (FWHM) of the focus is marked
    Dispersion characteristics of the metalens within ±0.5 μm of the design wavelength. The metalens with a design wavelength of 3 μm within the 2.5-3.5 μm wavelength range: (a) Normalized energy flow of the light field along the z-axis direction (x = 0), (b) the relationship between the focal position and the incident wavelength. The metalens with a design wavelength of 4 μm within the wavelength range of 3.5-4.5 μm: (c) Normalized energy flow of the light field along the z-axis direction (x = 0), (d) the relationship between the focal position and the incident wavelength. The metalens with a design wavelength of 5 μm within the 4.5-5.5 μm wavelength range: (e) Normalized energy flow of the light field along the z-axis direction (x = 0), (f) the relationship between the focal position and the incident wavelength
    Fig. 6. Dispersion characteristics of the metalens within ±0.5 μm of the design wavelength. The metalens with a design wavelength of 3 μm within the 2.5-3.5 μm wavelength range: (a) Normalized energy flow of the light field along the z-axis direction (x = 0), (b) the relationship between the focal position and the incident wavelength. The metalens with a design wavelength of 4 μm within the wavelength range of 3.5-4.5 μm: (c) Normalized energy flow of the light field along the z-axis direction (x = 0), (d) the relationship between the focal position and the incident wavelength. The metalens with a design wavelength of 5 μm within the 4.5-5.5 μm wavelength range: (e) Normalized energy flow of the light field along the z-axis direction (x = 0), (f) the relationship between the focal position and the incident wavelength
    Sanyong Deng, Song Yue, Dongliang Zhang, Zhaojun Liu, Huiyu Li, Yuan Liu, Zichen Zhang, Lianqing Zhu. Design of solid-immersion infrared metalens[J]. Infrared and Laser Engineering, 2022, 51(3): 20210360
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