Ge Zhang, Yun Cui, Jiaoling Zhao, Tao Wang, Yuan'an Zhao. Effect of Sample Tilting Angle on the Characterization of Nanofilms by Transmission Electron Microscopy[J]. Acta Optica Sinica, 2024, 44(2): 0231001
- Acta Optica Sinica
- Vol. 44, Issue 2, 0231001 (2024)
Fig. 1. Schematic diagrams of TEM cross-section sample tilting. (a) Schematic diagram of double tilting holder; (b) orientation diagram of thin film TEM cross-section sample placed in the sample holder
Fig. 2. TEM results of the 40-period Mo/Si multilayer film under different crystal zone axes of the substrate Si after tilting in the α direction. (a) TEM images; (b) HRTEM images
![Crystallography of [100] single-crystal Si wafer substrate［19］](/Images/icon/loading.gif){kind=icon}
Fig. 3. Crystallography of [100] single-crystal Si wafer substrate［19］
Fig. 4. Schematic diagrams of TEM sample tilting in the α direction. (a) XZ plan; (b) YZ plan
Fig. 5. TEM images of the 40-period Mo/Si multilayer film under different crystal zone axes of the substrate Si after tilting in the β direction
Fig. 6. Thickness change of the 40-period Mo/Si multilayer film after tilting in the β direction
Fig. 7. Schematic diagram of TEM sample tilting in the β direction
Fig. 8. Calculation results of relative error δ varies with the tilting angle β. (a) Thin films with Z=50 nm and different t0; (b) thin films with t0=5 nm and different Z
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Table 1. Thickness change of the 40-period Mo/Si multilayer film after tilting in the α direction
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Table 2. Thickness change of the 40-period Mo/Si multilayer film after tilting in the β direction
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