Theoretical analysis for AlGaN avalanche photodiodes with mesa and field plate structure

Ke-Xiu Dong; Dun-Jun Chen; Qing Cai; Yan-Li liu; Yu-Jie Wang

doi:10.1088/1674-1056/ab90f1

[1] Q Cai, W K Luo, Q Li, M Li, D J Chen, H Lu, R Zhang, Y D Zheng. Appl. Phys. Lett, 113(2018).

[2] Y Huang, D J Chen, H Lu, K X Dong, R Zhang, Y D Zheng, L Li, Z H Li. Appl. Phys. Lett, 101(2012).

[3] Y Tang, Q Cai, L H Yang, K X Dong, D J Chen, H Lu, R Zhang, Y D Zheng. Chin. Phys. B, 26(2017).

[4] I C Kizilyalli, T Prunty, O Aktas. IEEE Electron Dev. Lett, 36, 1073(2015).

[5] P Reddy, M H Breckenridge, A Klump, Q Guo, S Mita, B Sarkar, R Kirste, B Moody, J Tweedie, R Collazo, Z Sitar. IEEE Research and Applications of Photonics in Defense Conference (RAPID), 1(2019).

[6] T T T Pham, H Shin, E Chong, H Y Cha. J. Semicond. Sci. Technol, 18, 645(2018).

[7] H Y Cha. J. Korean Phys. Soc, 56, 672(2010).

[8] S Akiyama, M Kondo, L Wada, K Horio. Jpn. J. Appl. Phys, 58(2019).

[9] W Mao, J S Fan, M Du, J F Zhang, X F Zheng, C Wang, X H Ma, J C Zhang, Y Hao. Chin. Phys. B, 25(2016).

[10] X D Wang, W D Hu, M Pan, L W Hou, W Xie, J T Xu, X Y Li, X S Chen, W Lu. J. Appl. Phys, 115(2014).

[11] K X Dong, D J Chen, H Lu, B Liu, P Han, R Zhang, Y D Zheng. IEEE Photon. Technol. Lett, 25, 1510(2013).

[12] Y L Liu, W Wang, Y Dong, D J Chen, R Zhang, Y D Zheng. Acta Phys. Sin, 68(2019).

[13] R McClintock, A Yasan, K Minder, P Kung, M Razeghi. Appl. Phys. Lett, 87(2005).

[14] L Sun, J Chen, J Li, H Jiang. Appl. Phys. Lett, 97(2010).

[15] Z G Shao, D J Chen, H Lu, R Zhang, D P Cao, W J Luo, Y D Zheng, L Li, Z H Li. IEEE Electron Dev. Lett, 35, 372(2014).

[16] H D Liu, X G Zheng, Q G Zhou, , D C Mcintosh, J C Campbell. IEEE J. Quantum Elect, 45, 1524(2009).