Changdong Ma, Fei Lu, Bo Xu. Mechanism of the smart cut of LiTaO3 by hydrogen ion implantation[J]. Chinese Optics Letters, 2015, 13(Suppl.): S23101
- Chinese Optics Letters
- Vol. 13, Issue Suppl., S23101 (2015)
Fig. 1. Vacancies and hydrogen concentration for 6 × 10 16 cm − 2
Fig. 2. Cross section TEM images of the as-implanted sample (7 × 10 16 H + / cm 2
Fig. 3. Raman spectra of virgin, as-implanted, and annealed samples.
Fig. 4. IR absorption spectra of the samples.
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Table 1. Surface Blistering on Dependency of Experimental Parameters
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