Qi-Hui ZHOU, Chen-Xi LIU. Research on millimeter-wave ridged half-mode waveguide filter based on periodic defected ground structure[J]. Journal of Infrared and Millimeter Waves, 2022, 41(4): 690
- Journal of Infrared and Millimeter Waves
- Vol. 41, Issue 4, 690 (2022)
Fig. 1. The fundamental mode electric field distributions（at 30 GHz）of（a）rectangle waveguide. and（b）ridged half-mode waveguide.（Parameters： w1 = 5 500，h1 = 400，w = 1 000，wr = 1 000，h = 400，hr = 200，unit：µm）
Fig. 2. Equivalent transverse circuit of the RHMW
Fig. 3. The structure of the RHMW filter（a）top view（b）3D view without wafer or transitions（c）geometry of the DGS unit（d）side view（Parameters：l = 3 000，wT = 1450，w = 725，wr = 725，p = 550，ls = 440，ws = 560，d = 360，g = 200，s = 20，hr = 50，h = 100，unit：µm）
Fig. 4. The full-wave simulated S-parameters of the filter (a) with different wT (wr/wT = 0.5), (b) with different ls
Fig. 5. Microfabrication process flow of the RHMW filter
Fig. 6. （a）The microscope image of the fabricated filter，（b）the laser confocal microscope 3-D images of the sidewall，（c）curve fitting of the sidewall
Fig. 7. The comparison of the S-parameters between the original model，modified model and the prototype
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