Detector-integrated vertical-cavity surface-emitting laser with a movable high-contrast grating mirror

Minglu Wang; Hongling Peng; Chenxi Hao; Xuyan Zhou; Wanhua Zheng; Anjin Liu

doi:10.1364/PRJ.519679

Journals >Photonics Research >Volume 12 >Issue 7 >Page 1437 > Article

Photonics Research
Vol. 12, Issue 7, 1437 (2024)

Detector-integrated vertical-cavity surface-emitting laser with a movable high-contrast grating mirror

Minglu Wang^1,2,3, Hongling Peng⁴, Chenxi Hao^1,2, Xuyan Zhou⁴..., Wanhua Zheng^2,4,5 and Anjin Liu^1,2,*|Show fewer author(s)

Author Affiliations

¹Key Laboratory of Optoelectronic Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

⁴Key Laboratory of Solid-State Optoelectronics Information Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

⁵e-mail: whzheng@semi.ac.cn

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DOI: 10.1364/PRJ.519679 Cite this Article Set citation alerts

Minglu Wang, Hongling Peng, Chenxi Hao, Xuyan Zhou, Wanhua Zheng, Anjin Liu, "Detector-integrated vertical-cavity surface-emitting laser with a movable high-contrast grating mirror," Photonics Res. 12, 1437 (2024) Copy Citation Text

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Abstract

In this paper, we present a detector-integrated vertical-cavity surface-emitting laser (VCSEL) with a movable high-contrast grating (HCG) mirror in an n-i-p-i-n manner. The detector-integrated VCSEL with a movable HCG can achieve three functions, including wavelength tuning, power monitoring, and resonant-cavity-enhanced (RCE) photon detection. Currently, the device can achieve a wavelength tuning range of 27 nm at room temperature when the suspended HCG is driven by the reverse-bias voltage. The n-i-p structure located at the upper part of the device can serve as an intra-cavity photodiode to monitor the output power due to the defect absorption. The RCE photon detection function of the detector-integrated VCSEL with a movable HCG is measured, and it has a peak responsivity at about 926 nm. This detector-integrated VCSEL with a movable HCG will be useful for sensing and imaging.