• Acta Optica Sinica
  • Vol. 43, Issue 11, 1113002 (2023)
Guangying Zhou1、3, Yuejing Qi1、3、*, Liang Li2, Miao Jiang2, Jiangliu Shi2, and Mingyi Yao1、3
Author Affiliations
  • 1Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
  • 2Beijing Superstring Academy of Memory Technology, Beijing 100176, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.3788/AOS222161 Cite this Article Set citation alerts
    Guangying Zhou, Yuejing Qi, Liang Li, Miao Jiang, Jiangliu Shi, Mingyi Yao. Robustness Analysis Method and Simulation Research of Alignment Mark[J]. Acta Optica Sinica, 2023, 43(11): 1113002 Copy Citation Text show less
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    Guangying Zhou, Yuejing Qi, Liang Li, Miao Jiang, Jiangliu Shi, Mingyi Yao. Robustness Analysis Method and Simulation Research of Alignment Mark[J]. Acta Optica Sinica, 2023, 43(11): 1113002
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