Author Affiliations
1 School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China2 Key Laboratory of Ministry of Industry and Information Technology, General Technology of Functional Parts of Numerical Control Machine, Zhangjiagang, Jiangsu 215600, Chinashow less
Fig. 1. Measurement index of slider
Fig. 2. Sensor installation diagram; (b) sensor layout
Fig. 3. Intersection model of plane and cylindrical surface. (a) Plane intersects the bottom of the cylinder; (b) plane does not pass through the bottom of the cylinder
Fig. 4. Diagram of sensor installation declination β
Fig. 5. Relationship between a' and angle β. (a) When β is between 0° and 5°; (b) when β is between -6° and 10°
Fig. 6. (a) Tooling assembly drawing; (b) side view of the test
Fig. 7. Results of runout of air flotation platform. (a) Vertical runout; (b) horizontal runout
Fig. 8. Schematic of measuring standard round bar with arbitrary position
Fig. 9. Measured contour image of slider. (a) Missing point; (b) when β=0°; (c) when β>0°
Fig. 10. Slider contour image when rotating β angle. (a) β=0°; (b) β=2°; (c) β=5°
R1 /mm | R2 /mm | β1 /(°) | β2 /(°) | ΔR2max /μm | ΔR2min /μm | σ /mm | ΔR /μm |
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10.5 | 10 | 0.158 | 0.146 | 1.987 | -1.991 | 1.940 | -1.066 | 10 | 10.5 | 0.145 | 0.156 | 1.660 | -1.435 | 1.314 | -0.097 | 10.5 | 9 | 0.297 | 0.314 | 1.735 | -1.624 | 1.894 | -0.203 | 9 | 10.5 | 0.226 | 0.219 | 1.878 | -4.685 | 1.833 | -0.941 | 10.5 | 11 | 0.170 | 0.183 | 1.914 | -1.782 | 1.647 | -0.524 | 11 | 10.5 | 0.178 | 0.172 | 4.511 | -0.471 | 1.431 | 1.331 | 10 | 11 | 0.346 | 0.169 | 3.000 | -4.405 | 2.056 | -0.468 | 11 | 10 | 0.211 | 0.224 | -0.749 | -3.169 | 0.620 | -1.877 | 10 | 9 | 0.147 | 0.180 | 2.116 | 0.224 | 0.701 | 1.008 | 9 | 10 | 0.148 | 0.091 | 1.392 | -1.130 | 0.960 | 0.634 | 11 | 9 | 0.163 | 0.170 | 1.456 | -1.897 | 1.492 | -0.588 | 9 | 11 | 0.200 | 0.212 | 0.990 | -0.750 | 1.441 | -1.446 |
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Table 1. Measurement results of standard round bar cross test
β /(°) | Δβ1 /(°) | Δβ2 /(°) | ΔR2max /μm | ΔR2min /μm | σ /μm | ΔR /μm |
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0 | 0.148 | 0.131 | 1.392 | -1.130 | 0.960 | 0.634 | 2 | 0.157 | 0.173 | 1.201 | -2.064 | 1.394 | -0.656 | 5 | 0.103 | 0.112 | 2.515 | -2.925 | 1.621 | -1.352 | -3 | 0.168 | 0.156 | 0.087 | -2.420 | 0.743 | -1.374 |
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Table 2. Measurement results of verification test of sensor installation angle β
n | β1 /(°) | β2 /(°) | ΔR2max /μm | ΔR2min /μm | σ /μm | ΔR /μm |
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0 | 0.148 | 0.131 | 1.392 | -1.130 | 0.960 | 0.634 | 1 | 0.156 | 0.140 | 1.275 | -1.278 | 1.127 | 0.556 | 2 | 0.141 | 0.152 | 1.547 | -0.958 | 0.913 | 0.127 | 3 | 0.139 | 0.148 | 1.576 | -0.965 | 0.632 | 0.392 |
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Table 3. Measurement results of arbitrary pose verification tests
β /(°) | Δβ1 /(°) | Δβ2 /(°) | ΔR2max /μm | ΔR2min /μm | σ /μm | ΔR /μm |
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0 | 0.189 | 0.169 | 1.884 | 0.378 | 1.044 | 1.042 | 2 | 0.158 | 0.182 | 1.235 | -0.365 | 0.527 | 0.579 | 5 | 0.152 | 0.179 | 1.396 | -0.258 | 0.752 | 0.774 |
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Table 4. Measurement results of slider when rotating β angle