• Acta Optica Sinica
  • Vol. 37, Issue 10, 1012005 (2017)
Xiaoyun Xu1、2, Yi Ou1、2、*, Hutian Feng1、2, Kai Wang1、2, and Rui Wang1、2
Author Affiliations
  • 1 School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China
  • 2 Key Laboratory of Ministry of Industry and Information Technology, General Technology of Functional Parts of Numerical Control Machine, Zhangjiagang, Jiangsu 215600, China
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    DOI: 10.3788/AOS201737.1012005 Cite this Article Set citation alerts
    Xiaoyun Xu, Yi Ou, Hutian Feng, Kai Wang, Rui Wang. Tilt Measurement of Profile Accuracy of Slider Inner Raceway[J]. Acta Optica Sinica, 2017, 37(10): 1012005 Copy Citation Text show less
    Measurement index of slider
    Fig. 1. Measurement index of slider
    Sensor installation diagram; (b) sensor layout
    Fig. 2. Sensor installation diagram; (b) sensor layout
    Intersection model of plane and cylindrical surface. (a) Plane intersects the bottom of the cylinder; (b) plane does not pass through the bottom of the cylinder
    Fig. 3. Intersection model of plane and cylindrical surface. (a) Plane intersects the bottom of the cylinder; (b) plane does not pass through the bottom of the cylinder
    Diagram of sensor installation declination β
    Fig. 4. Diagram of sensor installation declination β
    Relationship between a' and angle β. (a) When β is between 0° and 5°; (b) when β is between -6° and 10°
    Fig. 5. Relationship between a' and angle β. (a) When β is between 0° and 5°; (b) when β is between -6° and 10°
    (a) Tooling assembly drawing; (b) side view of the test
    Fig. 6. (a) Tooling assembly drawing; (b) side view of the test
    Results of runout of air flotation platform. (a) Vertical runout; (b) horizontal runout
    Fig. 7. Results of runout of air flotation platform. (a) Vertical runout; (b) horizontal runout
    Schematic of measuring standard round bar with arbitrary position
    Fig. 8. Schematic of measuring standard round bar with arbitrary position
    Measured contour image of slider. (a) Missing point; (b) when β=0°; (c) when β>0°
    Fig. 9. Measured contour image of slider. (a) Missing point; (b) when β=0°; (c) when β>0°
    Slider contour image when rotating β angle. (a) β=0°; (b) β=2°; (c) β=5°
    Fig. 10. Slider contour image when rotating β angle. (a) β=0°; (b) β=2°; (c) β=5°
    R1 /mmR2 /mmβ1 /(°)β2 /(°)ΔR2max /μmΔR2min /μmσ /mmΔR /μm
    10.5100.1580.1461.987-1.9911.940-1.066
    1010.50.1450.1561.660-1.4351.314-0.097
    10.590.2970.3141.735-1.6241.894-0.203
    910.50.2260.2191.878-4.6851.833-0.941
    10.5110.1700.1831.914-1.7821.647-0.524
    1110.50.1780.1724.511-0.4711.4311.331
    10110.3460.1693.000-4.4052.056-0.468
    11100.2110.224-0.749-3.1690.620-1.877
    1090.1470.1802.1160.2240.7011.008
    9100.1480.0911.392-1.1300.9600.634
    1190.1630.1701.456-1.8971.492-0.588
    9110.2000.2120.990-0.7501.441-1.446
    Table 1. Measurement results of standard round bar cross test
    β /(°)Δβ1 /(°)Δβ2 /(°)ΔR2max /μmΔR2min /μmσ /μmΔR /μm
    00.1480.1311.392-1.1300.9600.634
    20.1570.1731.201-2.0641.394-0.656
    50.1030.1122.515-2.9251.621-1.352
    -30.1680.1560.087-2.4200.743-1.374
    Table 2. Measurement results of verification test of sensor installation angle β
    nβ1 /(°)β2 /(°)ΔR2max /μmΔR2min /μmσ /μmΔR /μm
    00.1480.1311.392-1.1300.9600.634
    10.1560.1401.275-1.2781.1270.556
    20.1410.1521.547-0.9580.9130.127
    30.1390.1481.576-0.9650.6320.392
    Table 3. Measurement results of arbitrary pose verification tests
    β /(°)Δβ1 /(°)Δβ2 /(°)ΔR2max /μmΔR2min /μmσ /μmΔR /μm
    00.1890.1691.8840.3781.0441.042
    20.1580.1821.235-0.3650.5270.579
    50.1520.1791.396-0.2580.7520.774
    Table 4. Measurement results of slider when rotating β angle
    Xiaoyun Xu, Yi Ou, Hutian Feng, Kai Wang, Rui Wang. Tilt Measurement of Profile Accuracy of Slider Inner Raceway[J]. Acta Optica Sinica, 2017, 37(10): 1012005
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