Yunlong Zhu, Zhuoran Li, Xu Lu, Yonggui Yuan, Jun Yang, "White light interferometry with spectral-temporal demodulation for large-range thickness measurement," Chin. Opt. Lett. 20, 091201 (2022)
- Chinese Optics Letters
- Vol. 20, Issue 9, 091201 (2022)
Fig. 1. Experimental results for a single measurement of 500 nm SiO2 coating. (a) Reflectance spectrum F(k), Fref(k), and Fp(k). (b) Comparison of measured reflectance R(k) and theoretical model. (c) Normalized sum of squared errors for reflectance fitting between the experimental result and theoretical model at different values of input thickness. (d) Detailed view of (c) showing the minimum sum of squared errors.
Fig. 2. Experimental results for a single measurement of 68 µm Si film. (a) Reflectance spectrum F(k), Fref(k), and Fp(k). (b) Comparison of measured reflectance R(k) and theoretical model. (c) Normalized sum of squared errors for reflectance fitting between the experimental result and theoretical model at different values of input thickness. (d) Detailed view of (c) showing the minimum sum of squared errors.
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Table 1. Measurement Results for 500 nm SiO 2
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Table 2. Measurement Results for 68 µm Si Film Using Envelope Method (nm)
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Table 3. Measurement Results for 68 µm Si Film Using the Proposed Method (nm)
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Table 4. Summary of Measurement Uncertainty Components
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