White light interferometry with spectral-temporal demodulation for large-range thickness measurement

Yunlong Zhu; Zhuoran Li; Xu Lu; Yonggui Yuan; Jun Yang

doi:10.3788/COL202220.091201

Journals >Chinese Optics Letters >Volume 20 >Issue 9 >Page 091201 > Article

Chinese Optics Letters
Vol. 20, Issue 9, 091201 (2022)

White light interferometry with spectral-temporal demodulation for large-range thickness measurement

Yunlong Zhu^1、2, Zhuoran Li^1、2, Xu Lu^1、2, Yonggui Yuan^1、2、*, and Jun Yang^{2、3、4、**}

Author Affiliations

¹Key Laboratory of In-fiber Integrated Optics, Ministry of Education of China, Harbin Engineering University, Harbin 150001, China

²College of Physics and Optoelectronic Engineering, Harbin Engineering University, Harbin 150001, China

³Guangdong Provincial Key Laboratory of Information Photonics Technology (Guangdong University of Technology), Guangzhou 510006, China

⁴School of Information Engineering, Guangdong University of Technology, Guangzhou 510008, China

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DOI: 10.3788/COL202220.091201 Cite this Article Set citation alerts

Yunlong Zhu, Zhuoran Li, Xu Lu, Yonggui Yuan, Jun Yang. White light interferometry with spectral-temporal demodulation for large-range thickness measurement[J]. Chinese Optics Letters, 2022, 20(9): 091201 Copy Citation Text

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