Soliton frequency comb generation in CMOS-compatible silicon nitride microresonators

Yaozu Xie; Jiaqi Li; Yanfeng Zhang; Zeru Wu; Shihao Zeng; Shuqing Lin; Zhaoyang Wu; Wenchao Zhou; Yujie Chen; Siyuan Yu

doi:10.1364/PRJ.454816

[1] Z. L. Newman, V. Maurice, T. Drake, J. R. Stone, T. C. Briles, D. T. Spencer, C. Fredrick, Q. Li, D. Westly, B. R. Ilic, B. Shen, M.-G. Suh, K. Y. Yang, C. Johnson, D. M. S. Johnson, L. Hollberg, K. J. Vahala, K. Srinivasan, S. A. Diddams, J. Kitching, S. B. Papp, M. T. Hummon. Architecture for the photonic integration of an optical atomic clock. Optica, 6, 680-685(2019).

[2] E. Obrzud, M. Rainer, A. Harutyunyan, M. H. Anderson, J. Liu, M. Geiselmann, B. Chazelas, S. Kundermann, S. Lecomte, M. Cecconi, A. Ghedina, E. Molinari, F. Pepe, F. Wildi, F. Bouchy, T. J. Kippenberg, T. Herr. A microphotonic astrocomb. Nat. Photonics, 13, 31-35(2019).

[3] M. G. Suh, X. Yi, Y. H. Lai, S. Leifer, I. S. Grudinin, G. Vasisht, E. C. Martin, M. P. Fitzgerald, G. Doppmann, J. Wang, D. Mawet, S. B. Papp, S. A. Diddams, C. Beichman, K. Vahala. Searching for exoplanets using a microresonator astrocomb. Nat. Photonics, 13, 25-30(2019).

[4] P. Marin-Palomo, J. N. Kemal, M. Karpov, A. Kordts, J. Pfeifle, M. H. P. Pfeiffer, P. Trocha, S. Wolf, V. Brasch, M. H. Anderson, R. Rosenberger, K. Vijayan, W. Freude, T. J. Kippenberg, C. Koos. Microresonator-based solitons for massively parallel coherent optical communications. Nature, 546, 274-279(2017).

[5] A. Fülöp, M. Mazur, A. Lorences-Riesgo, Ó. B. Helgason, P. H. Wang, Y. Xuan, D. E. Leaird, M. Qi, P. A. Andrekson, A. M. Weiner, V. Torres-Company. High-order coherent communications using mode-locked dark-pulse Kerr combs from microresonators. Nat. Commun., 9, 1(2018).

[6] M. G. Suh, K. J. Vahala. Soliton microcomb range measurement. Science, 359, 884-887(2018).

[7] P. Trocha, M. Karpov, D. Ganin, M. H. P. Pfeiffer, A. Kordts, S. Wolf, J. Krockenberger, P. Marin-Palomo, C. Weimann, S. Randel, W. Freude, T. J. Kippenberg, C. Koos. Ultrafast optical ranging using microresonator soliton frequency combs. Science, 359, 887-891(2018).

[8] J. Riemensberger, A. Lukashchuk, M. Karpov, W. Weng, E. Lucas, J. Liu, T. J. Kippenberg. Massively parallel coherent laser ranging using a soliton microcomb. Nature, 581, 164-170(2020).

[9] J. Wang, Z. Lu, W. Wang, F. Zhang, J. Chen, Y. Wang, J. Zheng, S. T. Chu, W. Zhao, B. E. Little, X. Qu, W. Zhang. Long-distance ranging with high precision using a soliton microcomb. Photon. Res., 8, 1964-1972(2020).

[10] M. G. Suh, Q. F. Yang, K. Y. Yang, X. Yi, K. J. Vahala. Microresonator soliton dual-comb spectroscopy. Science, 354, 600-603(2016).

[11] W. Liang, D. Eliyahu, V. S. Ilchenko, A. A. Savchenkov, A. B. Matsko, D. Seidel, L. Maleki. High spectral purity Kerr frequency comb radio frequency photonic oscillator. Nat. Commun., 6, 7957(2015).

[12] D. T. Spencer, S. H. Lee, D. Y. Oh, M.-G. Suh, K. Y. Yang, K. Vahala. An optical-frequency synthesizer using integrated photonics. Nature, 557, 81-85(2018).

[13] X. Xu, M. Tan, B. Corcoran, J. Wu, A. Boes, T. G. Nguyen, S. T. Chu, B. E. Little, D. G. Hicks, R. Morandotti, A. Mitchell, D. J. Moss. 11 TOPS photonic convolutional accelerator for optical neural networks. Nature, 589, 44-51(2021).

[14] J. Feldmann, N. Youngblood, M. Karpov, H. Gehring, X. Li, M. Stappers, M. Le Gallo, X. Fu, A. Lukashchuk, A. S. Raja, J. Liu, C. D. Wright, A. Sebastian, T. J. Kippenberg, W. H. P. Pernice, H. Bhaskaran. Parallel convolutional processing using an integrated photonic tensor core. Nature, 589, 52-58(2021).

[15] Z. Yang, M. Jahanbozorgi, D. Jeong, S. Sun, O. Pfister, H. Lee, X. Yi. A squeezed quantum microcomb on a chip. Nat. Commun., 12, 1(2021).

[16] Y. Zhang, M. Menotti, K. Tan, V. D. Vaidya, D. H. Mahler, L. G. Helt, L. Zatti, M. Liscidini, B. Morrison, Z. Vernon. Squeezed light from a nanophotonic molecule. Nat. Commun., 12, 8(2021).

[17] M. W. Puckett, K. Liu, N. Chauhan, Q. Zhao, N. Jin, H. Cheng, J. Wu, R. O. Behunin, P. T. Rakich, K. D. Nelson, D. J. Blumenthal. 422 million intrinsic quality factor planar integrated all-waveguide resonator with sub-MHz linewidth. Nat. Commun., 12, 934(2021).

[18] P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, T. J. Kippenberg. Optical frequency comb generation from a monolithic microresonator. Nature, 450, 1214-1217(2007).

[19] T. Herr, V. Brasch, J. D. Jost, C. Y. Wang, N. M. Kondratiev, M. L. Gorodetsky, T. J. Kippenberg. Temporal solitons in optical microresonators. Nat. Photonics, 8, 145-152(2014).

[20] X. Xue, Y. Xuan, Y. Liu, P. H. Wang, S. Chen, J. Wang, D. E. Leaird, M. Qi, A. M. Weiner. Mode-locked dark pulse Kerr combs in normal-dispersion microresonators. Nat. Photonics, 9, 594-600(2015).

[21] D. C. Cole, E. S. Lamb, P. Del’Haye, S. A. Diddams, S. B. Papp. Soliton crystals in Kerr resonators. Nat. Photonics, 11, 671-676(2017).

[22] J. Chiles, N. Nader, D. D. Hickstein, S. P. Yu, T. C. Briles, D. Carlson, H. Jung, J. M. Shainline, S. Diddams, S. B. Papp, S. W. Nam, R. P. Mirin. Deuterated silicon nitride photonic devices for broadband optical frequency comb generation. Opt. Lett., 43, 1527-1530(2018).

[23] Z. Wu, Y. Zhang, S. Zeng, J. Li, Y. Xie, Y. Chen, S. Yu. Low-noise Kerr frequency comb generation with low temperature deuterated silicon nitride waveguides. Opt. Express, 29, 29557-29566(2021).

[24] C. Xiang, J. Liu, J. Guo, L. Chang, R. N. Wang, W. Weng, J. Peters, W. Xie, Z. Zhang, J. Riemensberger, J. Selvidge, T. J. Kippenberg, J. E. Bowers. Laser soliton microcombs heterogeneously integrated on silicon. Science, 373, 99-103(2021).

[25] Z. Wu, Z. Shao, Z. Xu, Y. Zhang, L. Liu, C. Yang, Y. Chen, S. Yu. High quality factor deuterated silicon nitride (SiN:D) microring resonators. Conference on Lasers and Electro-Optics/Pacific Rim, W4D.5(2018).

[26] A. Frigg, A. Boes, G. Ren, I. Abdo, D.-Y. Choi, S. Gees, A. Mitchell. Low loss CMOS-compatible silicon nitride photonics utilizing reactive sputtered thin films. Opt. Express, 27, 37795-37805(2019).

[27] H. El Dirani, A. Kamel, M. Casale, S. Kerdiles, C. Monat, X. Letartre, M. Pu, L. K. Oxenløwe, H. El Dirani, A. Kamel, M. Casale, S. Kerdiles, C. Monat, H. El Dirani, A. Kamel, M. Casale, S. Kerdiles. Annealing-free Si₃N₄ frequency combs for monolithic integration with Si photonics. Appl. Phys. Lett., 113, 081102(2018).

[28] T. Hiraki, T. Aihara, H. Nishi, T. Tsuchizawa. Deuterated SiN/SiON waveguides on Si platform and their application to C-band WDM filters. IEEE Photon. J., 9, 2500207(2017).

[29] A. V. Osinsky, R. A. Bellman, I. A. Akwani, P. A. Sachenik, S. L. Logunov, J. W. McCamy. Optical loss mechanisms in GeSiON planar waveguides. Appl. Phys. Lett., 81, 2002-2004(2002).

[30] Z. Wu, S. Zeng, Y. Chen, Y. Zhang, S. Yu. Frequency comb generation in a deuterated-SiN_x micro-ring resonator with sidewall Bragg gratings. Frontiers in Optics, FW4D.2(2020).

[31] S. Tang, Y. Zhang, Z. Wu, L. Zhou, L. Liu, Y. Chen, Y. Yu. Tunable microwave photonic filter based on silicon nitride MZI-assist micro-ring resonator. Asia Communications and Photonics Conference, M3E.4(2019).

[32] T. Hiraki, T. Aihara, K. Takeda, T. Fujii, T. Kakitsuka, T. Tsuchizawa, H. Fukuda, S. Matsuo. Membrane InGaAsP Mach-Zehnder modulator with SiN:D waveguides on Si platform. Opt. Express, 27, 18612-18619(2019).

[33] H. Nishi, T. Fuji, N. P. Diamantopoulos, K. Takeda, E. Kanno, T. Kakitsuka, T. Tsuchizawa, H. Fukuda, S. Matsuo. Integration of eight-channel directly modulated membrane-laser array and SiN AWG multiplexer on Si. J. Lightwave Technol., 37, 266-273(2019).

[34] Z. Wu, Z. Xu, Y. Zhang, H. Chen, Y. Chen, S. Yu. Four-wave mixing parametric oscillation in deuterated silicon nitride microresonators prepared by low-temperature (100 °C) PECVD platform. European Conference on Lasers and Electro-Optics, ce_4_5(2019).

[35] Z. Wu, Y. Chen, Z. Xu, L. Liu, H. Chen, Y. Zhang, S. Yu. Waveguide-integrated deuterated silicon nitride (SiN:D) microdisk resonators for nonlinear photonics. Asia Communications and Photonics Conference, 1-3(2019).

[36] D. T. Spencer, J. F. Bauters, M. J. R. Heck, J. E. Bowers. Integrated waveguide coupled Si₃N₄ in the ultrahigh-Q regime. Optica, 1, 153-157(2014).

[37] W. Jin, Q. F. Yang, L. Chang, B. Shen, H. Wang, M. A. Leal, L. Wu, M. Gao, A. Feshali, M. Paniccia, K. J. Vahala, J. E. Bowers. Hertz-linewidth semiconductor lasers using CMOS-ready ultra-high-Q microresonators. Nat. Photonics, 15, 346-353(2021).

[38] K. Luke, A. Dutt, C. B. Poitras, M. Lipson. Overcoming Si₃N₄ film stress limitations for high quality factor ring resonators. Opt. Express, 21, 22829-22833(2013).

[39] Q. Li, A. A. Eftekhar, M. Sodagar, Z. Xia, A. H. Atabaki, A. Adibi. Vertical integration of high-Q silicon nitride microresonators into silicon-on-insulator platform. Opt. Express, 21, 18236-18248(2013).

[40] M. H. P. Pfeiffer, J. Liu, A. S. Raja, T. Morais, B. Ghadiani, T. J. Kippenberg. Ultra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss origins. Optica, 5, 884-892(2018).

[41] H. El Dirani, L. Youssef, C. Petit-Etienne, S. Kerdiles, P. Grosse, C. Monat, E. Pargon, C. Sciancalepore. Ultralow-loss tightly confining Si₃N₄ waveguides and high-Q microresonators. Opt. Express, 27, 30726-30740(2019).

[42] Z. Ye, K. Twayana, P. A. Andrekson, V. Torres-Company. High-Q Si₃N₄ microresonators based on a subtractive processing for Kerr nonlinear optics. Opt. Express, 27, 35719-35727(2019).

[43] X. Ji, J. K. Jang, U. D. Dave, M. Corato-Zanarella, C. Joshi, A. L. Gaeta, M. Lipson. Exploiting ultralow loss multimode waveguides for broadband frequency combs. Laser Photon. Rev., 15, 2000353(2020).

[44] J. Liu, G. Huang, R. N. Wang, J. He, A. S. Raja, T. Liu, N. J. Engelsen, T. J. Kippenberg. High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits. Nat. Commun., 12, 2236(2021).

[45] W. Jin, D. D. John, J. F. Bauters, T. Bosch, B. J. Thibeault, J. E. Bowers. Deuterated silicon dioxide for heterogeneous integration of ultra-low-loss waveguides. Opt. Lett., 45, 3340-3343(2020).

[46] X. Ji, F. A. S. Barbosa, S. P. Roberts, A. Dutt, J. Cardenas, Y. Okawachi, A. Bryant, A. L. Gaeta, M. Lipson. Ultra-low-loss on-chip resonators with sub-milliwatt parametric oscillation threshold. Optica, 4, 619-624(2017).

[47] H. Zhou, Y. Geng, W. Cui, S. W. Huang, Q. Zhou, K. Qiu, C. Wei Wong. Soliton bursts and deterministic dissipative Kerr soliton generation in auxiliary-assisted microcavities. Light Sci. Appl., 8, 1(2019).

[48] T. Herr, K. Hartinger, J. Riemensberger, C. Y. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, T. J. Kippenberg. Universal formation dynamics and noise of Kerr-frequency combs in microresonators. Nat. Photonics, 6, 480-487(2012).

[49] M. Karpov, H. Guo, A. Kordts, V. Brasch, M. H. P. Pfeiffer, M. Zervas, M. Geiselmann, T. J. Kippenberg. Raman self-frequency shift of dissipative Kerr solitons in an optical microresonator. Phys. Rev. Lett., 116, 103902(2016).