Qiming CHEN, Renxuan FU, Yongjun XU, Yibiao LIU, Jinyun ZHOU, Xianwen SONG. Fabrication of SU-8 microstructure and PDMS concentration gradient generator by moving focal plane front and back exposure[J]. Chinese Journal of Quantum Electronics, 2023, 40(3): 415

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- Chinese Journal of Quantum Electronics
- Vol. 40, Issue 3, 415 (2023)
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