• Acta Optica Sinica
  • Vol. 30, Issue 3, 777 (2010)
Fan Chao1、2、*, Chen Tangsheng2, Yang Lijie2, Feng Ou2, Jiao Shilong1、2, Wu Yunfeng1, and Ye Yutang1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    DOI: 10.3788/aos20103003.0777 Cite this Article Set citation alerts
    Fan Chao, Chen Tangsheng, Yang Lijie, Feng Ou, Jiao Shilong, Wu Yunfeng, Ye Yutang. Fabrication of Optoelectronic Integrated Circuits Optical Receiver Front-End and Limiting Amplifier[J]. Acta Optica Sinica, 2010, 30(3): 777 Copy Citation Text show less

    Abstract

    A 10 Gb/s optoelectronic integrated circuits (OEIC) optical receiver front-end has been studied and fabricated based on domestic material and semiconductor process. A limiting amplifier (LA) has been designed and realized by using depletion mode pseudomorphic high electron mobility transistor (PHEMT). The OEIC optical receiver comprises a metal-semiconductor-metal (MSM) photodetector and a current mode transimpedance amplifier (TIA),and a device model has been established and optimized by simulation software SILVACO. The photodetector has a photosensitive area of 50 μm×50 μm,a bandwidth of 10 GHz and a capacitance of 3 fF/μm. The etch-stop process has been developed completely and applied to the fabrication of OEIC device,and the chip has an area of 1511 μm×666 μm. The bandwidth of LA is expanded by inductance which has been simulated by software HFSS. The chip area is 1950 μm×1910 μm and the measured results demonstrate a transfer rate of 3.125 Gb/s (10 and 500 mV) with constant output swing 500 mV.
    Fan Chao, Chen Tangsheng, Yang Lijie, Feng Ou, Jiao Shilong, Wu Yunfeng, Ye Yutang. Fabrication of Optoelectronic Integrated Circuits Optical Receiver Front-End and Limiting Amplifier[J]. Acta Optica Sinica, 2010, 30(3): 777
    Download Citation