Phase Shift Error Analysis of a Phase-shifting Interference Algorithm with Small Phase Step Size

Roujing CHEN; Sen HAN; Yanhui KANG; Chunfeng XU; Xueyuan LI

doi:10.3788/gzxb20225111.1112003

[1] J SCHWIDER. Phase shifting interferometry: reference phase error reduction. Applied Optics, 28, 3889-3892(1989).

[2] K KINNSTAETTER, A W LOHMANN, J SCHWIDER et al. Accuracy of phase shifting interferometry. Applied Optics, 27, 5082-5089(1988).

[3] Zhaoyang WANG, B HAN. Advanced iterative algorithm for phase extraction of randomly phase shifted interferograms. Optics Letter, 29, 1671-1673(2004).

[4] M M JESUS, J C R FRANCISCO, G P L FRANCISCO et al. Phase recovery from interferograms under high amplitude vibrations. Optics Express, 22, 31387-31395(2014).

[5] Qian LIU, Yun WANG, Fang JI et al. Vibration-insensitive phase-shifting interferometry based on frequency domain analysis. Optics and Precision Engineering, 23, 252-259(2015).

[6] Wenqian LU, Jianxin LI, Mingliang DUAN et al. Anti-vibration interferometric shape measurement based on tilt phase. Acta Optica Sinica, 41, 106-112(2021).

[7] Genwang HUANG. Research on Fizeau phase-shifting laser interferometer(2011).

[8] L L DECK, P J D E GROOT. Numerical simulations of vibration in phase-shifting interferometry. Applied Optics, 35, 2172-2178(1996).

[9] P J DE GROOT. Vibration in phase-shifting interferometer. Journal of The Optical Society of America A, 12, 354-365(1995).

[10] J C ESTRADA, M SERVIN, J A QUIROGA. A self-tuning phase-shifting algorithm for interferometry. Optics Express, 18, 2632-2638(2010).

[11] P HARIHARAN, B F OREB, T EIJU. Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm. Applied Optics, 26, 2504-2506(1987).

[12] MALACARA , DANIEL . Optical shop testing(2007).

[13] Fengwei LIU. Study of key technology of random phase shifting interferometry(2017).

[14] Junli ZHENG, Qiheng YING, Weili YANG. Signal and system(2000).

[15] J F MOSINO, M SERVIN, J C ESTRADA et al. Phasorial analysis of detuning error in temporal phase shifting algorithms. Optics Express, 17, 5618-5623(2009).

[16] Rihong ZHU, Jinbang CHEN, Qing WANG et al. A new algorithm on phase shifting interferometry: the overlapping averaging 4-frame algorithm. Acta Optica Sinica, 14, 1288-1293(1994).