• Acta Photonica Sinica
  • Vol. 51, Issue 11, 1112003 (2022)
Roujing CHEN1, Sen HAN1、3、*, Yanhui KANG2, Chunfeng XU1, and Xueyuan LI3
Author Affiliations
  • 1School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China
  • 2National Institute of Metrology,Beijing 100029,China
  • 3Suzhou H&L Instruments LLC,Suzhou,Jiangsu 215123,China
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    DOI: 10.3788/gzxb20225111.1112003 Cite this Article
    Roujing CHEN, Sen HAN, Yanhui KANG, Chunfeng XU, Xueyuan LI. Phase Shift Error Analysis of a Phase-shifting Interference Algorithm with Small Phase Step Size[J]. Acta Photonica Sinica, 2022, 51(11): 1112003 Copy Citation Text show less
    The sinusoidal phase error function sin(2φ(x))
    Fig. 1. The sinusoidal phase error function sin(2φx))
    The phase error ε0΄ at random phase shift error
    Fig. 2. The phase error ε0΄ at random phase shift error
    Interferograms at phase shift 20°
    Fig. 3. Interferograms at phase shift 20°
    The phase shift step retrieval error by self-tuning algorithm within ±10% calibration error
    Fig. 4. The phase shift step retrieval error by self-tuning algorithm within ±10% calibration error
    The phase retrieval error by self-tuning algorithm within ±10% calibration error
    Fig. 5. The phase retrieval error by self-tuning algorithm within ±10% calibration error
    The phase retrieval error by Hariharan algorithm within ±10% calibration error
    Fig. 6. The phase retrieval error by Hariharan algorithm within ±10% calibration error
    The phase shift step retrieval error by self-tuning algorithm at smaller phase shift steps with same calibration error
    Fig. 7. The phase shift step retrieval error by self-tuning algorithm at smaller phase shift steps with same calibration error
    The phase retrieval error by self-tuning algorithm at smaller phase shift steps with same calibration error
    Fig. 8. The phase retrieval error by self-tuning algorithm at smaller phase shift steps with same calibration error
    The phase retrieval error by Hariharan algorithm at smaller phase shift steps with same calibration error
    Fig. 9. The phase retrieval error by Hariharan algorithm at smaller phase shift steps with same calibration error
    The phase retrieval error by self-tuning algorithm within 5% random phase shift error
    Fig. 10. The phase retrieval error by self-tuning algorithm within 5% random phase shift error
    The phase retrieval error by Hariharan algorithm within 5% random phase shift error
    Fig. 11. The phase retrieval error by Hariharan algorithm within 5% random phase shift error
    The phase error by self-tuning algorithm on a specific row of pixels
    Fig. 12. The phase error by self-tuning algorithm on a specific row of pixels
    The phase retrieval error by self-tuning algorithm at smaller phase shift steps with same random error
    Fig. 13. The phase retrieval error by self-tuning algorithm at smaller phase shift steps with same random error
    The phase retrieval error by Hariharan algorithm at smaller phase shift steps with same random error
    Fig. 14. The phase retrieval error by Hariharan algorithm at smaller phase shift steps with same random error
    Random error/radCalculated phase shift amount/radPhase error PV/RMS by self-tuning algorithm/λPhase error PV/RMS by Hariharan algorithm/λ
    0.336 60.340 80.352 50.356 00.350 60.005 1/0.001 80.005 1/0.001 8
    0.354 20.357 90.350 20.354 70.351 10.000 6/0.000 20.000 9/0.000 3
    0.353 90.361 10.348 60.356 10.353 90.000 3/0.000 10.001 2/0.000 4
    0.343 90.347 50.360 40.361 80.362 40.004 7/0.001 70.004 6/0.001 6
    0.359 00.342 40.353 60.339 30.344 80.004 9/0.001 70.004 7/0.001 7
    Table 1. Random phase shift errors and simulation results
    Roujing CHEN, Sen HAN, Yanhui KANG, Chunfeng XU, Xueyuan LI. Phase Shift Error Analysis of a Phase-shifting Interference Algorithm with Small Phase Step Size[J]. Acta Photonica Sinica, 2022, 51(11): 1112003
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