Fig. 1. The sinusoidal phase error function sin(2φ(x))
Fig. 2. The phase error ε0΄ at random phase shift error
Fig. 3. Interferograms at phase shift 20°
Fig. 4. The phase shift step retrieval error by self-tuning algorithm within ±10% calibration error
Fig. 5. The phase retrieval error by self-tuning algorithm within ±10% calibration error
Fig. 6. The phase retrieval error by Hariharan algorithm within ±10% calibration error
Fig. 7. The phase shift step retrieval error by self-tuning algorithm at smaller phase shift steps with same calibration error
Fig. 8. The phase retrieval error by self-tuning algorithm at smaller phase shift steps with same calibration error
Fig. 9. The phase retrieval error by Hariharan algorithm at smaller phase shift steps with same calibration error
Fig. 10. The phase retrieval error by self-tuning algorithm within 5% random phase shift error
Fig. 11. The phase retrieval error by Hariharan algorithm within 5% random phase shift error
Fig. 12. The phase error by self-tuning algorithm on a specific row of pixels
Fig. 13. The phase retrieval error by self-tuning algorithm at smaller phase shift steps with same random error
Fig. 14. The phase retrieval error by Hariharan algorithm at smaller phase shift steps with same random error
Random error/rad | Calculated phase shift amount/rad | Phase error PV/RMS by self-tuning algorithm/λ | Phase error PV/RMS by Hariharan algorithm/λ |
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0.336 6 | 0.340 8 | 0.352 5 | 0.356 0 | 0.350 6 | 0.005 1/0.001 8 | 0.005 1/0.001 8 | 0.354 2 | 0.357 9 | 0.350 2 | 0.354 7 | 0.351 1 | 0.000 6/0.000 2 | 0.000 9/0.000 3 | 0.353 9 | 0.361 1 | 0.348 6 | 0.356 1 | 0.353 9 | 0.000 3/0.000 1 | 0.001 2/0.000 4 | 0.343 9 | 0.347 5 | 0.360 4 | 0.361 8 | 0.362 4 | 0.004 7/0.001 7 | 0.004 6/0.001 6 | 0.359 0 | 0.342 4 | 0.353 6 | 0.339 3 | 0.344 8 | 0.004 9/0.001 7 | 0.004 7/0.001 7 |
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Table 1. Random phase shift errors and simulation results