Fig. 1. Basic geometries of laser writing of waveguides: (a) single-line, (b) double-line, (c) depressed-cladding, and (d) optical-lattice-like configurations. The dark (gray) regions represent the laser-induced tracks.
Fig. 2. Optical microscope images of laser-induced tracks with (a) different pulse energies and (b) scanning velocity in
crystal. (c) Different refractive index change profiles from positive to negative, depending on the propagation wavelength in ZnSe crystal. Image (c) is reproduced with permission from Ref.
103, Creative Commons Attribution License (CC-BY).
Fig. 3. (a) Microscope images of tracks with different pulse energies and scanning rates in
. (b) Influence of different laser polarizations on the tracks and modal profiles in Nd:YAP, perpendicular to the scans (No. 1) and parallel to the scans (No. 2), respectively. Images reprinted from Ref.
75, © 2016 The Optical Society (OSA). (c) Optical images of tracks as the laser writing along different crystalline orientations in
. (d) Laser-induced multifoci in
, corresponding horizontal waveguides, and modal profiles. Reprinted with permission from Ref.
109, © 2019 IEEE.
Fig. 4. Schematic diagram of direct laser-written cladding waveguides (a) with an ellipsoidal focal spot and (b) with a slit-shaped beam focus. Images (a), (b), and (g) are reprinted with permission from Ref.
40, © 2017 OSA. (c) The phase mask for writing horizontal lines. Microscope image of (d) horizontal tracks, (e) waveguide, and (f) near-field profiles. Images (c)–(f) are reproduced with permission from Ref.
42, CC-BY. (g) Schematic plot of single-scan cladding waveguides utilizing a longitudinal ring-shaped focal field. (h) Calculated 3D isosurface, (i) phase mask, and (j) simulated focal intensity profile. (k) Microscope image and (l), (m) corresponding modal profiles. Images (h)–(m) are reprinted with permission from Ref.
118, © 2019 Chinese Laser Press (CLP).
Fig. 5. (a) Schematic design of a waveguide-integrated LiQPM grating; (b) SH microscope image of LiQPM grating and waveguide; and (c) helical grating structure. Microscope image of the helical structure: (d) the front face and (e) top view. Images reprinted with permission from Ref.
43, © 2020 OSA.
Fig. 6. (a) Microscope images of hollow optical-lattice-like structures at different etching times in YAG crystal. (b) Before polished and (c) after polished. Near-field modal profiles at
along (d) TM and (e) TE polarization, respectively. Images reproduced with permission from Ref.
129, © 2020 CLP.
Fig. 7. (a) Microscope images and modal profiles of tailored multiline waveguides in a
crystal, reproduced with permission from Ref.
91, © 2018 Elsevier. (b) Ring-shaped waveguide based on type-I modification in a BGO crystal, reprinted with permission from Ref.
136, © 2017 OSA. (c) Polarization engineering for dual-line waveguides in a
crystal, reproduced with permission from Ref.
167, © 2020 Elsevier. (d) The “ear-like” waveguide in Nd:YAG crystal, reprinted with permission from Ref.
168, © 2021 OSA. (e) Double-cladding waveguide in
crystal, reprinted with permission from Ref.
169, © 2019 OSA.
Fig. 8. (a) Fabrication and 3D schematic diagram of
-splitters based on rectangular cladding geometry in Ti:sapphire crystal, (b) microscope image of 1-deg branching angle, and (c) intensity distributions at 1064 nm. Images (a)–(c) are reproduced with permission from Ref.
181, © 2018 Elsevier. Microscope images of
-branch with circular cladding structure (d) in top view and (e) in cross section, as well as modal profiles of two arms. Images (d) and (e) are reproduced with permission from Ref.
179, © 2017 Elsevier. (f) 3D beam-splitting structures in a
crystal, reprinted with permission from Ref.
182, © 2018 Optica.
Fig. 9. (a) Schematic illustration of
beam splitting and ring-shaped transformation based on photonic-lattice-like structures. Image (a) is reproduced from Ref.
102. (b) Measured evolution of ring-shaped transformation in a Nd:YAG crystal. The scale bar is
. (c) Prototype design and microscope images of
beam splitters in a
crystal, (d) measured and (e) simulated modal profile. Images (c)–(e) are reprinted with permission from Ref.
145, © 2016 IEEE.
Fig. 10. (a) Microscope images in top view, (b) end-face of polarization beam splitters, and (c) modal profiles along
,
, and circular polarizations, respectively. Images (a)–(c) are reprinted with permission from Ref.
184, © 2020 IEEE. (d) Schematic plot and microscope images of 3D polarizer. (c) Modal profiles at different polarizations. Images (d) and (e) are reprinted with permission from Ref.
167, © 2020 IEEE.
Fig. 11. (a) Microscopic pictures of a tapered cladding waveguide in a Nd:YAG crystal and (b) modal profiles at the input radii of
and output of
, respectively. (c) Modal profiles of a straight and tapered waveguide at the same output radii from an incident LED light, reproduced with permission from Ref.
185, CC-BY. (d) Prototype of depressed-cladding 3D waveguide arrays. (e) Optical micrographs at the output face for different separations between the central and adjacent waveguides. Images (d) and (e) are reprinted with permission from Ref.
186, © 2017 IEEE.
Fig. 12. (a), (b) Geometry and cross-section design in the interaction region of the
directional coupler in a
crystal. (c), (d) Top and output view microscope images and (e) output intensity distribution. Images (a)–(e) are reproduced with permission from Ref.
187, CC-BY. (f) Schematic plot of
directional coupler integrated with 3D microelectrodes in a
crystal. (g) Output intensity profiles with different voltages. Images (f) and (g) are reprinted with permission from Ref.
118, © 2019 CLP.
Fig. 13. Complex waveguide laser modal profiles at
: (a), (b)
-branches, (c)
-branch, (d) ring-shaped transformation, and (e) optical-lattice-like. Images (a) and (d) are reproduced with permission from Ref.
100. Images (b) and (c) are reprinted with permission from Ref.
101, © 2016 IEEE. Image (e) is reprinted with permission from Ref.
75, © 2016 OSA. (f) Schematic illustration of the fabrication process of an
-curved waveguide, (g) laser spectra of dual-wavelengths at 1064 and 1079 nm, and (h) RF spectrum of modelocking at 31.69 GHz. Images (f)–(h) are reprinted with permission from Ref.
159, © 2020 IEEE.
Fig. 14. (a) Waveguide-integrated 3D LiQPM scheme, one period, two periods, and four periods in a
crystal. (b) Simultaneous SHG of four wavelengths and the fundamental and second harmonic modal profiles of a single period. Images (a) and (b) are reprinted with permission from Ref.
43, © 2020 OSA. (c) Experimental setup of the ultraviolet SHG process using LiQPM structure in a quartz crystal and (d) the SHG response signal of 177.3 nm. Images (c) and (d) are reproduced with permission from Ref.
124, CC-BY. (e) Schematic diagram of femtosecond laser-written cladding waveguide in a fan-out PPSLT crystal and (f) temperature tuning curves of seven waveguides with different poling periods. Images (e) and (f) are reprinted with permission from Ref.
148, © 2019 OSA.
Fig. 15. (a), (b) Microscope image and near-field intensity profile of a type-II waveguide in a
crystal. (c) Energy-level structure of
ground and
excited manifolds. (d) Light-storage experiments using the AFC protocol. Images (a)–(d) are reproduced with permission from Ref.
229, © 2016 American Physical Society (APS). (e), (f) End-face and top-view microscope images of type I and type II waveguides and modal profiles in
crystal, respectively. (g) Time-resolved histogram for signal photons, internal storage efficiency
at different storage times, and cross-correlation values between idler photons and stored signal photons. Images (e)–(g) are reprinted with permission from Ref.
52, © 2018 Optica.
Fig. 16. (a) Experimental setup of coherent optical memory based on an on-chip waveguide. (b) Guided mode intensity distribution of laser-written ridge waveguides in an
crystal. (c), (d) Top and front view microscope images. Images are reproduced with permission from Ref.
230, © 2020 APS.
Fig. 17. Schematic illustration of the PLACE fabrication process. (a) Cr thin-film deposition, (b) Cr patterning, (c) CMP, (d) chemical wet etching, and (e) coating
film. Images (a)–(e) are reproduced with permission from Ref.
236, © 2020 Chinese Physical Society (CPL). (f) Camera photo of the 11-cm-long LNOI waveguide, (g) microscope image, and (h) enlarged image. Images (f)–(h) are reproduced with permission from Ref.
232, CC-BY. (i) SEM image of LNOI microdisk. Image (i) is reproduced with permission from Ref.
233, CC-BY.
Waveguide configuration | Advantages | Disadvantages | Type I | 1. Direct writing for 3D micromachining | 1. Distorted lattices with degraded bulk features | 2. Single-mode guiding structures | 2. Bad thermal stabilities | 3. Longer wavelength guidance using multiscan technique | 3. Guidance only along one polarization | 4. Realizable in limited crystals | Double line | 1. Well-preserved bulk features | 1. No guidance at long wavelength (e.g., mid-IR) | 2. Single- or low-order mode structures | 2. Guidance only along one polarization in some crystals (e.g., cubic YAG) | 3. Being easily achieved in crystals | 4. Excellent thermal stabilities | 3. Being difficult for 3D waveguides | 5. Wide applicability in crystals | Depressed cladding | 1. Well-preserved bulk features | 1. Relatively longer production time | 2. Guidance till long wavelength | 2. Being difficult for 3D waveguides | 3. Designed geometry and adjustable diameters | 4. Very good thermal stabilities | 5. High coupling efficiency with fibers | 6. Potential guidance along any transverse direction | 7. Wide applicability in crystals | Optical-lattice-like cladding | 1. Being similar to double line and depressed cladding | 1. Special design for different functions and materials | 2. 3D device by special designs |
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Table 1. Advantages and disadvantages of different configurations in transparent material.
Crystal system | Material | Waveguide configuration | Guiding properties | Ref. | Polarization dependence | Minimum propagation loss (dB/cm) | Cubic crystals | Nd:YAG | Type I (single line) | TE and TM | 5@632.8 nm | 87 | Dual line | TM | 0.21@632.8 nm | 79 | Double cladding | TE and TM | 1.3@632.8 nm | 132 | Optical-lattice like | TE and TM | 0.7@1064 nm | 100 | Cladding + dual line | TE and TM | — | 133 | Nd:GGG | Dual line | TM | 2.0@632.8 nm | 134 | Depressed cladding | TE and TM | 1.7@632.8 nm | 135 | BGO | Type I (multiscan) | TE and TM | | 89 | Type I (ring shaped) | TE and TM | 1.56@1550 nm | 136 | Dual line | TE and TM | 0.5/632.8 nm | 137 | Depressed cladding | TE and TM | 2.1@632.8 nm | 137 | Tetragonal crystals | | Dual line | TE and TM | 0.8@632.8 nm | 138 | Depressed cladding | TE and TM | 1.1@632.9 nm | 139 | Optical-lattice like | — | — | 140 | | Dual line | TM | 0.5@1064 nm | 141 | Depressed cladding | TE and TM | 0.7@632.8 nm | 142 | Hexagonal crystals | 6H-SiC | Dual line | TM | 0.78@1064 nm | 143 | Rectangular cladding | TE and TM | 1.62@1064 nm | 143 | Trigonal crystals | | Type I (single line) | TM | 2.22@1064 nm | 144 | Type I (multiline) | TM | 1.98@632.8 nm | 91 | Dual line (vertical) | TM | 0.6@1064 nm | 63 | Dual line (horizontal) | TE | 3.25@1550 nm | 41 | Depressed cladding | TE and TM | 1.25@1550 nm | 118 | Optical-lattice like | TE | 1.27@1550 nm | 145 | Ridge configuration | TM | | 146 | | Type I (single line) | TM | 2.67@632.8 nm | 147 | Dual line (horizontal) | TE | 1.7@632.8 nm | 109 | Depressed cladding | TE and TM | 1.56@1550 nm | 148 | Rectangular cladding | TE and TM | 0.12@1550 nm | 149 | β-BBO | Depressed cladding | TM | 0.19@800 nm | 150 | Sapphire | Type I | TE and TM | 2.3@633 nm | 151 | Dual line | TM | 0.65@798.5 nm | 152 | Depressed cladding | TE and TM | 0.37@2850 nm | 80 | Optical-lattice like | TE and TM | 2.9@1064 nm | 153 | Orthorhombic crystals | KTP | Type I (multiline) | TM | 1.0@980 nm | 154 | Dual line | TE and TM | 0.8@633 nm | 155 | Depressed cladding | TE and TM | 1.7@632.8 nm | 156 | Optical-lattice like | TE and TM | 1.2@632.8 nm | 157 | Nd:YAP | Depressed cladding | TE and TM | 0.15@1064 nm | 158 | Optical-lattice like | TE and TM | 1.11@1064 nm | 159 | Monoclinic crystals | | Depressed cladding | TE and TM | 0.6@1064 nm | 160 | Nd:YCOB | Type I | TM | 1,1@1550 nm | 85 | Depressed cladding | TM and TE | — | 161 | Nd:GdCOB | Double cladding | TM and TE | 0.65@633 nm | 162 | Nd:KGW | Dual line | TM and TE | 2.0@632.8 nm | 163 | Depressed cladding | TM and TE | 1.8@1064 nm | 164 |
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Table 2. Summary of latest published works about waveguide configuration and properties of typical crystals in different crystal systems.
Wavelength band | Gain media | Working wavelength (nm) | Cavity configuration | Operation regime | Laser performance | Ref. | Lasing threshold (mW) | Max. output power (mW) | Slope efficiency | Visible | | 531 | Cladding | CW | 5 | 0.1 | — | 161 | | 532 | Dual line | CW | — | 0.032 | — | 188 | | 634.5 | Dual line | CW | 190 | 28.1 | 8% | 189 | | 525.3 | Dual line | CW | 1088 | 36 | | 190 | 644 | 516 | 1065 | 37% | 724.9 | 885 | 504 | 25% | | 604 | Rhombic cladding | CW | 360 | 25 | 5.6% | 191 | 720 | 243 | 12 | 2.0% | Ti : sapphire | 700 to 870 | Dual line | CW | 84 | 143 | 23.5% | 192 | 798.5 | Dual line | CWML (21.25 GHz) | 1160.1 | 87.48 | — | 152 | Near-infrared | | 1013.9 and 1027.9 | Cladding | CW and -switched | 152.2 | 26.6 | 10% | 193 | Yb : YAG | 1030 | -curved dual line | CW | 141 | 1 W | 79% | 194 | -branch dual line | CW | 271 | 2.29 W | 52% | 97 | Dual line | -switched | 102 | 5.6 W | 74% | 195 | Dual line | QML (2 GHz) | 1800 | 322 | 11.3% | 196 | Double cladding | CW | 401.7 | 45.8 | 38% | 172 | Yb : KLuW | 1040 | Surface cladding | -switched | 491 | 680 | 61% | 197 | Nd : YAG | 1064 | Annular ring shaped | CW | 191 | 84 | 20% | 132 | Ear-like cladding | CW and -switched | 10 | 327 | 34.4% | 168 | Cladding | -switched | 287 | 102.3 | 11.9% | 198 | QML (8.8 GHz) | 74 | 127 | 26% | 199 | 1061.58 and 1064.18 | Cladding | CWML (9.8 GHz) | — | 530 | — | 200 | 1064 | -branch cladding | CW | 231 | 172 | 22.4% | 180 | 1 × 2 splitters | CW | 90 | 333 | 34% | 101 | 1 × 4 splitters | 90 | 217 | 22% | Ring shaped | CW and -switched | 148 | 224 | 22% | 100 | | 1064 | Cladding | CW | 10.3 W | 3.4 W | 36% | 139 | -switched | 57.4 | 275 | 37% | 201 | QML (6.5 GHz) | 65 | 424 | 56% | 202 | CWML (6.5 GHz) | 19.3 | 259 | 30.6% | 203 | Double cladding | -switched | 59 | 397 | 46% | 169 | Optical-lattice like | -switched | — | 85 | 20% | 140 | Nd : YAP | 1064 and 1079 | Cladding | CW | 243 | 199.8 | 33.4% | 158 | -curved cladding | QML (7.9 GHz) | 196 | 77 | 14.1 | 159 | -curved optical-lattice like | 228 | 57 | 10.69 | 1072 and 1079 | Optical-lattice like | CW | 384.5 | 101.3 | 30.9 | 75 | | 1063.6 | Dual line | CW | 52 | 256 | 70% | 141 | 1064.5 | Cladding | CW and -switched | 178 | 570 | 68% | 142 | Nd : GGG | 1061 | Dual line | CW | 29 | 11 | 25% | 134 | 1063 | Cladding | CW | 270 | 209 | 44.4% | 135 | | 1066.4 | Dual line | CW | 98 | 30 | 14% | 204 | Nd : KGW | 1065 | Dual line | CW | 141 | 33 | 52.3% | 163 | 1067 | Cladding | CW | 120 | 198.5 | 39.4% | 164 | MIR | | 1847.4 | Surface cladding | CW | 52 | 171.1 | 37.8% | 205 | 1846.8 | -switched | 500 | 150 | 34.6% | 1849.6 | Cladding | CW | 45 | 247 | 48.7% | 206 | 1844.8 | -switched | — | 24.9 | 9.3% | 1847 | Optical-lattice like | CW | 21 | 46 | 9.9% | 207 | 1841 to 1848 | -branch cladding | CW | 280 | 460 | 40.6% | 208 | Tm : YAG | 1943.5 | Cladding | QML (7.8 GHz) | 665 | 6.5 | 2% | 209 | | 2055 | Cladding | CW | 180 | 212 | 67.3% | 210 | | 2080 | Surface cladding | CW | 120 | 132 | 38.9% | 211 | Ho : YAG | 2091 | Cladding | QML (5.9 GHz) | — | 170 | 6.8% | 212 | 2096 | CW | 100 | 1775 | 16% | 213 | Cr : ZnS | 2333 | Cladding | CW | 450 | 101 | 20% | 214 | Cr : ZnSe | 2522 | Cladding | CW | — | 5200 | 41% | 215 | Fe : ZnSe | 4070 | Cladding | CW | — | 995 | 58% |
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Table 3. Summary of reported results for waveguide lasers emitting at different wavelengths based on various laser-cavity designs.
Crystal | Waveguide configuration | Laser regime | (nm) | (nm) | SHG configuration | () | Norm. efficiency () | Ref. | BBO | Cladding | CW | 800 | 400 | BPM | 1.05 mW | 0.98% | 219 | PPKTP | Type I (multiscan) | CW | 800 | 400 | QPM | | 0.02% | 154 | PPSLT | Cladding | CW | 800 | 396 to 401 (tunable) | QPM | 0.37 mW | 0.39% | 221 | PPKTP | Dual line | CW | 943.18 | 471.59 | QPM | 76 mW | 4.6% | 222 | | Cladding | Pulsed | 1030 | 515 | BPM | — | — | 223 | Type I (multiline) | Pulsed | 1064 | 532 | BPM | 12.45 W (peak) | 0.27% | 218 | Dual line | Pulsed | 1064 | 532 | BPM | 4.95 W (peak) | 0.14% | Cladding | Pulsed | 1064 | 532 | BPM | 40.40 mW (peak) | 0.87% | Cladding | Pulsed | 1064 | 532 | LiQPM | 25.1 W (peak) | 0.0637% | 127 | Cladding | Pulsed | 1065.3, 1064, 1061.6, and 1060.5 | 532.65, 532, 530.8, and 530.25 | LiQPM | 1.33 W (peak) | 0.64% () | 43 | PPMgSLT | Cladding | CW | 1064 | 532 | QPM | | 0.74% | 224 | Cladding | CW | 1050 | 525 | QPM | 8.5 W | 0.16% | 220 | Cladding | CW | 1064 | 532 | QPM | 14.87 mW | 3.55% | 148 | Cladding | Pulsed | 1064 | 532 | QPM | 153 W (peak) | 54.3% () | | Optical-lattice like (1 × 4 splitters) | CW | 1064 | 532 | BPM | 0.65 mW | 1.5% | 157 | Optical-lattice like (straight) | CW | 1064 | 532 | BPM | 0.67 mW | 0.87% | Hybrid optical-lattice | CW | 1064 | 532 | BPM | 0.8 mW | 1.1% | 121 |
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Table 4. Summary of latest results for frequency converters in femtosecond laser-written waveguides.