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    Journals >Chinese Journal of Lasers >Volume 50 >Issue 20 >Page 2002202 > Article
    • Chinese Journal of Lasers
    • Vol. 50, Issue 20, 2002202 (2023)
    Simulation and Experimental Research on Flat Top Femtosecond Laser Grooving of Silicon Wafer
    Zhe Zhang1、2, Qi Song1、3, Kunpeng Zhang1, Mei Xue1, Yu Hou1、*, and Zichen Zhang1、**
    Author Affiliations
  • 1Microelectronics Instruments and Equipment R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
  • 2School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun 130022, Jiling, China
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    DOI: 10.3788/CJL230518 Cite this Article Set citation alerts
    Zhe Zhang, Qi Song, Kunpeng Zhang, Mei Xue, Yu Hou, Zichen Zhang. Simulation and Experimental Research on Flat Top Femtosecond Laser Grooving of Silicon Wafer[J]. Chinese Journal of Lasers, 2023, 50(20): 2002202 Copy Citation Text show less
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    Article index updated: May. 20, 2024
    Citation counts are provided from Researching.
    The article is cited by 2 article(s) from Researching.
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    Zhe Zhang, Qi Song, Kunpeng Zhang, Mei Xue, Yu Hou, Zichen Zhang. Simulation and Experimental Research on Flat Top Femtosecond Laser Grooving of Silicon Wafer[J]. Chinese Journal of Lasers, 2023, 50(20): 2002202
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    Paper Information
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