• Laser & Optoelectronics Progress
  • Vol. 58, Issue 21, 2114011 (2021)
Lihao Wang1、2、3, Dengyuan Fu1、2、3, Junyuan Zhao1、2、3, Songqing Zhao4、5, Genshui Wu4、5, Haiyan Chen4、5, Yinfang Zhu1、2、3、*, and Jinling Yang1、2、3、**
Author Affiliations
  • 1Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3State Key Laboratory of Transducer Technology, Shanghai 200050, China
  • 4China Airbome Missile Academy, Luoyang , Henan 471009, China
  • 5Aviation Key Laboratory of Science and Technology on Airbome Guided Weapons, Luoyang , Henan 471009, China
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    DOI: 10.3788/LOP202158.2114011 Cite this Article Set citation alerts
    Lihao Wang, Dengyuan Fu, Junyuan Zhao, Songqing Zhao, Genshui Wu, Haiyan Chen, Yinfang Zhu, Jinling Yang. VCSEL Array Microsystem Packaging Based on SiP Technology[J]. Laser & Optoelectronics Progress, 2021, 58(21): 2114011 Copy Citation Text show less

    Abstract

    This paper proposes a microsystem composed of vertical cavity surface-emitting laser arrays, laser driver chips, and power chips based on system in package technology to meet the needs of the hardware-in-the-loop simulation system. In addition, a manufacturing process flow based on microelectromechanical systems technology was developed. The packaging method has a high level of integration and high reliability. Driving efficiency and space utilization are significantly improved compared with other driving and packaging methods. Consequently, it has broad application prospects in optical imaging, communication, and interconnection, laying the groundwork for realizing the laser-imaging generator in semi-physical simulation systems.
    Lihao Wang, Dengyuan Fu, Junyuan Zhao, Songqing Zhao, Genshui Wu, Haiyan Chen, Yinfang Zhu, Jinling Yang. VCSEL Array Microsystem Packaging Based on SiP Technology[J]. Laser & Optoelectronics Progress, 2021, 58(21): 2114011
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