• Acta Optica Sinica
  • Vol. 42, Issue 9, 0912006 (2022)
Wenyao Liu1、2, Chenxi Liu1、2, Wei Li1、2, Enbo Xing1、2, Yanru Zhou1、*, Jianjun Chen2, Jun Tang1、2, and Jun Liu1、2、**
Author Affiliations
  • 1Shanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan 0 30051, Shanxi, China
  • 2State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 0 30051, Shanxi, China
  • show less
    DOI: 10.3788/AOS202242.0912006 Cite this Article Set citation alerts
    Wenyao Liu, Chenxi Liu, Wei Li, Enbo Xing, Yanru Zhou, Jianjun Chen, Jun Tang, Jun Liu. Nano-Opto-Electromechanical Magnetic Vector Sensor Design Based on Black Phosphorus[J]. Acta Optica Sinica, 2022, 42(9): 0912006 Copy Citation Text show less
    References

    [1] Xu L, Wang S, Jiang Z et al. Programmable synchronization enhanced MEMS resonant accelerometer[J]. Microsystems & Nanoengineering, 6, 63(2020).

    [2] Chelnokov Y N. Inertial navigation in space using the regular quaternion equations of astrodynamics[J]. Mechanics of Solids, 54, 157-168(2019).

    [3] Herrera-May A L, Aguilera-Cortés L A, García-Ramírez P J et al. Resonant magnetic field sensors based on MEMS technology[J]. Sensors, 9, 7785-7813(2009).

    [4] Park B, Li M T, Liyanage S et al. Lorentz force based resonant MEMS magnetic-field sensor with optical readout[J]. Sensors and Actuators A: Physical, 241, 12-18(2016).

    [5] Dolleman R J, Davidovikj D. Cartamil-Bueno S J, et al. Graphene squeeze-film pressure sensors[J]. Nano Letters, 16, 568-571(2016).

    [6] Liu Y Q, Zhang J R, Han D D et al. Recent progress in laser-processed graphene for sensors and actuators[J]. Chinese Journal of Lasers, 48, 1502003(2021).

    [7] Chen Z D, Li J C, Xiao S L et al. Laser reduced graphene oxide for thin film flexible electronic devices[J]. Laser & Optoelectronics Progress, 57, 111428(2020).

    [8] Manzeli S, Dumcenco D, Migliato Marega G et al. Self-sensing, tunable monolayer MoS2 nanoelectromechanical resonators[J]. Nature Communications, 10, 4831(2019).

    [9] Fan X, Forsberg F, Smith A D et al. Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers[J]. Nature Electronics, 2, 394-404(2019).

    [10] Sun J, Muruganathan M, Mizuta H. Room temperature detection of individual molecular physisorption using suspended bilayer graphene[J]. Science Advances, 2, e1501518(2016).

    [11] Verbiest G J, Kirchhof J N, Sonntag J et al. Detecting ultrasound vibrations with graphene resonators[J]. Nano Letters, 18, 5132-5137(2018).

    [12] Liu Z Y, Cao H Q, Xu F et al. Graphene nanoelectromechanical system and its integration with optical fiber[J]. Laser & Optoelectronics Progress, 56, 110006(2019).

    [13] Xiong Y F, Xu F. Multifunctional integration on optical fiber tips: challenges and opportunities[J]. Advanced Photonics, 2, 064001(2020).

    [14] Midolo L, Schliesser A, Fiore A. Nano-opto-electro-mechanical systems[J]. Nature Nanotechnology, 13, 11-18(2018).

    [15] Wang Z H. Feng P X L. Design of black phosphorus 2D nanomechanical resonators by exploiting the intrinsic mechanical anisotropy[J]. 2D Materials, 2, 021001(2015).

    [16] Jiang X H, Qin S C, Cao Y et al. Stable one-dimensional single crystalline black phosphorus nanowires for gas sensing[J]. ACS Applied Nano Materials, 3, 3402-3409(2020).

    [17] Ding H C, Zhang L, Tang Z R et al. Black phosphorus quantum dots doped ZnO nanoparticles as efficient electrode materials for sensitive hydrogen peroxide detection[J]. Journal of Electroanalytical Chemistry, 824, 161-168(2018).

    [18] Zhao Y, Zhuge Z, Tang Y H et al. Synthesis of a CuNP/chitosan/black phosphorus nanocomposite for non-enzymatic hydrogen peroxide sensing[J]. The Analyst, 145, 7260-7266(2020).

    [19] Guo W L, Song H Z, Yan S C. Stable black phosphorus quantum dots for alkali PH sensor[J]. Optics Communications, 406, 91-94(2018).

    [20] Liu Y, Huang Y Q, Zhao Y J et al. Luminescence properties of doped two-dimensional materials[J]. Laser & Optoelectronics Progress, 58, 1516014(2021).

    [21] Amogh B S, Selamneni V, Bokka N et al. Remarkably stable black phosphorus quantum dots-polyvinyl alcohol film as a water soluble breath sensor[J]. IEEE Transactions on Electron Devices, 68, 5167-5172(2021).

    [22] Abbas A N, Liu B L, Chen L et al. Black phosphorus gas sensors[J]. ACS Nano, 9, 5618-5624(2015).

    [23] Wang Z H, Jia H, Zheng X Q et al. Black phosphorus nanoelectromechanical resonators vibrating at very high frequencies[J]. Nanoscale, 7, 877-884(2015).

    [24] Islam A, van den Akker A, Feng P X L. Anisotropic thermal conductivity of suspended black phosphorus probed by opto-thermomechanical resonance spectromicroscopy[J]. Nano Letters, 18, 7683-7691(2018).

    [25] Jiang S W, Shi S, Wang X F. Nanomechanics and vibration analysis of graphene sheets via a 2D plate model[J]. Journal of Physics D: Applied Physics, 47, 045104(2014).

    [26] Jiang S W, Gong X H, Guo X et al. Potential application of graphene nanomechanical resonator as pressure sensor[J]. Solid State Communications, 193, 30-33(2014).

    [27] Wei Q, Peng X H. Superior mechanical flexibility of phosphorene and few-layer black phosphorus[J]. Applied Physics Letters, 104, 251915(2014).

    [28] Bian L X, Wen Y M, Li P et al. Magnetostrictive stress induced frequency shift in resonator for magnetic field sensor[J]. Sensors and Actuators A: Physical, 247, 453-458(2016).

    Wenyao Liu, Chenxi Liu, Wei Li, Enbo Xing, Yanru Zhou, Jianjun Chen, Jun Tang, Jun Liu. Nano-Opto-Electromechanical Magnetic Vector Sensor Design Based on Black Phosphorus[J]. Acta Optica Sinica, 2022, 42(9): 0912006
    Download Citation