Wenyao Liu, Chenxi Liu, Wei Li, Enbo Xing, Yanru Zhou, Jianjun Chen, Jun Tang, Jun Liu. Nano-Opto-Electromechanical Magnetic Vector Sensor Design Based on Black Phosphorus[J]. Acta Optica Sinica, 2022, 42(9): 0912006
- Acta Optica Sinica
- Vol. 42, Issue 9, 0912006 (2022)
Fig. 1. Structure and mechanical anisotropy of 2D black phosphorus material. (a) Schematic diagram of material structure; (b) diagram of mechanical anisotropy
Fig. 2. Resonant frequency as a function of stress loading angle in different resonant modes for graphene and BP. (a) Graphene; (b) BP
Fig. 3. BP NOEMS sensor. (a) 3D schematic diagram; (b) top view; (c) optical driving and readout system
Fig. 4. Resonant frequency and frequency difference in orthogonal direction of BP for different number of layers and length-width ratio. (a) Resonant frequency varying with number of layers; (b) resonant frequency varying with length-width ratio
Fig. 5. Spatial distributions of resonant fundamental modes varying with length-width ratio
Fig. 6. Polar coordinate diagram of three resonant modes of BP resonator (insert is spatial directivity of three resonant modes)
Fig. 7. Fundamental resonance frequency of BP varying with magnetic field intensity B0 at different angles. (a) Length-width ratio is 4; (b) length-width ratio is 4.5; (c) length-width ratio is 5
Fig. 8. Resonant frequency varying with magnetic field intensity for length-width ratio of 4.5 and its linear fitting in range of 40-100 mT
Fig. 9. Sensitivity and nonlinear error of device under different angle
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Table 1. Material mechanical parameters
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Table 2. Linear fitting parameters of structures with magnetic field of 40--100 mT at length-width ratio of 4.5
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