• Laser & Optoelectronics Progress
  • Vol. 56, Issue 11, 110501 (2019)
Wentao Zhang1, Yueyue Yang1, Yuting Zhang1, Ping Wu2, Xianming Xiong1, and Hao Du1、*
Author Affiliations
  • 1 School of Electronic Engineering and Automation, Guilin University of Electronic Technology, Guilin, Guangxi 541004, China
  • 2 Shanghai Micro Electronics Equipment (Group) Co., Ltd., Shanghai 201203, China
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    DOI: 10.3788/LOP56.110501 Cite this Article Set citation alerts
    Wentao Zhang, Yueyue Yang, Yuting Zhang, Ping Wu, Xianming Xiong, Hao Du. Detection of Rotation Angle of Reflective Grating Based on Interference Method[J]. Laser & Optoelectronics Progress, 2019, 56(11): 110501 Copy Citation Text show less

    Abstract

    Herein, a mathematical model of the relationship between grating rotation angle and diffraction beam deflection angle was established based on the theory of mosaic gratings. An optical path was designed to detect the grating rotation angle using interferometry. A Zygo interferometer was used to detect the zero- and first-order diffraction wavefronts of a grating. In addition, the model error caused by the reflector installation error was studied. The experimental results show that in the range of 0-500 μrad, the maximum relative measurement error of grid line parallelism between gratings is 3.85% when the theoretical model is used to adjust the grating attitude. When pitch and yaw angles of the reflector vary in the range of 0″-20″, the maximum relative measurement errors of grid line parallelism between gratings are 4.99% and 3.77%, respectively.
    Wentao Zhang, Yueyue Yang, Yuting Zhang, Ping Wu, Xianming Xiong, Hao Du. Detection of Rotation Angle of Reflective Grating Based on Interference Method[J]. Laser & Optoelectronics Progress, 2019, 56(11): 110501
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