[1] T. Thelemann, H. Thust, and M. Hintz, “Using LTCC for microsystems,” Microelectronics International, 2002, 19(3): 19-23.
[2] M. A. Fonseca, “Polymer/ceramic wireless MEMS pressure sensors for harsh environments: high temperature and biomedical applications,” Ph.D. dissertation, Georgia Institute of Technology, U.S.A., 2007.
[3] J. Xiong, Y. Li, Y. Hong, B. Zhang, T. Cui, Q. Tan, et al., “Wireless LTCC-based capacitive pressure sensor for harsh environment,” Sensors and Actuators A: Physical, 2013, 197: 30-37.
[4] J. English and M. G. Allen, “Wireless micromachined ceramic pressure sensors,” in Proc. Twelfth IEEE Micro-electro-mechanical Systems Conference, Orlando, FL, U.S.A., pp. 511-516, 1999.
[5] J. C. Butler, A. J. Vigliotti, F. W. Verdi, and S. M. Walsh, “Wireless, passive, resonant-circuit, inductively coupled, inductive strain sensor,” Sensors and Actuators A: Physical, 2002, 102(1): 61-66.
[6] M. A. Fonseca, J. M. English, M. Arx, and M. G. Allen, “Wireless micromachined ceramicpressure sensor for high-temperature applications,” Journal of Microelectrome-chanical Systems, 2002, 11(4): 337-343.
[7] R. Nopper, R. Niekrawietz, and L. Reindl, “Wireless readout of passive LC sensors,” IEEE Transaction Instrumentation and Measurement, 2010, 59(9): 2450-2457.
[8] H. Birol, T. Maeder, and P. Ryser, “Processing of graphite-based sacrificial layer for micro fabrication of low temperature co-fired ceramics (LTCC),” Sensors and Actuators A: Physical, 2006, 130(2): 560-567.
[9] Y. Imanaka, Multilayered Low Temperature Cofired Ceramics (LTCC) Technology. Japan: Springer Science, 2004.
[10] J. H. Lee, S. Pinel, J. Laskar, and M. M. Tentzeris. “Design and development of advanced cavity-based dual-mode filters using low-temperature co-fired ceramic technology for V-band gigabit wireless systems,” IEEE Transactions on Microwave Theory & Techniques, 2007, 55(9):1869-1879.
[11] G. Osavljevic, “Wireless LTCC sensors for monitoring of pressure,” Journal of Microelectronics, Electronic Components and Materials, 2012, 42(4): 272-281.