Miniature, highly sensitive MOSCAP ring modulators in co-optimized electronic-photonic CMOS

Hayk Gevorgyan; Anatol Khilo; Mark T. Wade; Vladimir M. Stojanović; Miloš A. Popović

doi:10.1364/PRJ.438047

[1] V. Stojanović, R. J. Ram, M. Popović, S. Lin, S. Moazeni, M. Wade, C. Sun, L. Alloatti, A. Atabaki, F. Pavanello, N. Mehta, P. Bhargava. Monolithic silicon-photonic platforms in state-of-the-art CMOS SOI processes. Opt. Express, 26, 13106-13121(2018).

[2] M. Rakowski, C. Meagher, K. Nummy, A. Aboketaf, J. Ayala, Y. Bian, B. Harris, K. Mclean, K. McStay, A. Sahin, L. Medina, B. Peng, Z. Sowinski, A. Stricker, T. Houghton, C. Hedges, K. Giewont, A. Jacob, T. Letavic, D. Riggs, A. Yu, J. Pellerin. 45 nm CMOS–silicon photonics monolithic technology (45CLO) for next-generation, low power and high speed optical interconnects. Optical Fiber Communication Conference, T3H.3(2020).

[3] C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y.-H. Chen, K. Asanović, R. J. Ram, M. A. Popović, V. M. Stojanović. Single-chip microprocessor that communicates directly using light. Nature, 528, 534-538(2015).

[4] N. B. Feilchenfeld, F. G. Anderson, T. Barwicz, S. Chilstedt, Y. Ding, J. Ellis-Monaghan, D. M. Gill, C. Hedges, J. Hofrichter, F. Horst, M. Khater, E. Kiewra, R. Leidy, Y. Martin, K. McLean, M. Nicewicz, J. S. Orcutt, B. Porth, J. Proesel, C. Reinholm, J. C. Rosenberg, W. D. Sacher, A. D. Stricker, C. Whiting, C. Xiong, A. Agrawal, F. Baker, C. W. Baks, B. Cucci, D. Dang, T. Doan, F. Doany, S. Engelmann, M. Gordon, E. Joseph, J. Maling, S. Shank, X. Tian, C. Willets, J. Ferrario, M. Meghelli, F. Libsch, B. Offrein, W. M. J. Green, W. Haensch. An integrated silicon photonics technology for O-band datacom. IEEE International Electron Devices Meeting (IEDM), 25.7.1-25.7.4(2015).

[5] K. Padmaraju, J. Chan, L. Chen, M. Lipson, K. Bergman. Thermal stabilization of a microring modulator using feedback control. Opt. Express, 20, 27999-28008(2012).

[6] C. Sun, M. Wade, M. Georgas, S. Lin, L. Alloatti, B. Moss, R. Kumar, A. H. Atabaki, F. Pavanello, J. M. Shainline, J. S. Orcutt, R. J. Ram, M. Popovic, V. Stojanovic. A 45 nm CMOS-SOI monolithic photonics platform with bit-statistics-based resonant microring thermal tuning. IEEE J. Solid-State Circuits, 51, 893-907(2016).

[7] M. Wade, E. Anderson, S. Ardalan, P. Bhargava, S. Buchbinder, M. L. Davenport, J. Fini, H. Lu, C. Li, R. Meade, C. Ramamurthy, M. Rust, F. Sedgwick, V. Stojanovic, D. Van Orden, C. Zhang, C. Sun, S. Y. Shumarayev, C. O’Keeffe, T. T. Hoang, D. Kehlet, R. V. Mahajan, M. T. Guzy, A. Chan, T. Tran. TeraPHY: a chiplet technology for low-power, high-bandwidth in-package optical I/O. IEEE Micro, 40, 63-71(2020).

[8] J. Sun, M. Sakib, J. Driscoll, R. Kumar, H. Jayatilleka, Y. Chetrit, H. Rong. A 128 Gb/s PAM4 silicon microring modulator. Optical Fiber Communications Conference and Exposition (OFC), Th4A.7(2018).

[9] Y. Tong, Z. Hu, X. Wu, S. Liu, L. Chang, A. Netherton, C.-K. Chan, J. E. Bowers, H. K. Tsang. An experimental demonstration of 160-Gbit/s PAM-4 using a silicon micro-ring modulator. IEEE Photon. Technol. Lett., 32, 125-128(2020).

[10] M. Georgas, J. Leu, B. Moss, C. Sun, V. Stojanovic. Addressing link-level design tradeoffs for integrated photonic interconnects. IEEE Custom Integrated Circuits Conference (CICC), 1-8(2011).

[11] D. A. B. Miller. Attojoule optoelectronics for low-energy information processing and communications. J. Lightwave Technol., 35, 346-396(2017).

[12] E. Timurdogan, C. M. Sorace-Agaskar, J. Sun, E. S. Hosseini, A. Biberman, M. R. Watts. An ultralow power athermal silicon modulator. Nat. Commun., 5, 4008(2014).

[13] A. Biberman, E. Timurdogan, W. A. Zortman, D. C. Trotter, M. R. Watts. Adiabatic microring modulators. Opt. Express, 20, 29223-29236(2012).

[14] M. Gehl, C. Long, D. Trotter, A. Starbuck, A. Pomerene, J. B. Wright, S. Melgaard, J. Siirola, A. L. Lentine, C. DeRose. Operation of high-speed silicon photonic micro-disk modulators at cryogenic temperatures. Optica, 4, 374-382(2017).

[15] H. Gevorgyan, D. V. Orden, D. Onural, A. Khilo, V. Stojanovic, M. Wade, M. Popovic. High shift efficiency O-band spoked-ring modulator allowing fully electro-optic channel tuning in a 45 nm CMOS platform. Conference on Lasers and Electro-Optics, SW3C.5(2021).

[16] M. Webster, C. Appel, P. Gothoskar, S. Sunder, B. Dama, K. Shastri. Silicon photonic modulator based on a MOS-capacitor and a CMOS driver. IEEE Compound Semiconductor Integrated Circuit Symposium (CSICS), 1-4(2014).

[17] J. V. Campenhout, M. Pantouvaki, P. Verheyen, S. Selvaraja, G. Lepage, H. Yu, W. Lee, J. Wouters, D. Goossens, M. Moelants, W. Bogaerts, P. Absil. Low-voltage, low-loss, multi-Gb/s silicon micro-ring modulator based on a MOS capacitor. Optics InfoBase Conference Papers, OM2E.4(2012).

[18] X. Huang, D. Liang, C. Zhang, G. Kurczveil, X. Li, J. Zhang, M. Fiorentino, R. Beausoleil. Heterogeneous MOS microring resonators. IEEE Photonics Conference (IPC), 121-122(2017).

[19] S. Srinivasan, D. Liang, R. G. Beausoleil. Heterogeneous SISCAP microring modulator for high-speed optical communication. European Conference on Optical Communications (ECOC), 1-3(2020).

[20] Q. Li, C. P. Ho, H. Tang, M. Okano, K. Ikeda, S. Takagi, M. Takenaka. Si racetrack optical modulator based on the III-V/Si hybrid MOS capacitor. Opt. Express, 29, 6824-6833(2021).

[21] E. S. Hosseini, S. Yegnanarayanan, A. H. Atabaki, M. Soltani, A. Adibi. Systematic design and fabrication of high-Q single-mode pulley-coupled planar silicon nitride microdisk resonators at visible wavelengths. Opt. Express, 18, 2127-2136(2010).

[22] H. Shoman, H. Jayatilleka, A. H. K. Park, A. Mistry, N. A. F. Jaeger, S. Shekhar, L. Chrostowski. Compact wavelength- and bandwidth-tunable microring modulator. Opt. Express, 27, 26661-26675(2019).

[23] A. L. Gaeta, M. Lipson, T. J. Kippenberg. Photonic-chip-based frequency combs. Nat. Photonics, 13, 158-169(2019).

[24] J. Y. W. Seto. The electrical properties of polycrystalline silicon films. J. Appl. Phys., 46, 5247-5254(1975).

[25] A. H. Atabaki, S. Moazeni, F. Pavanello, H. Gevorgyan, J. Notaros, L. Alloatti, M. T. Wade, C. Sun, S. A. Kruger, H. Meng, K. Al Qubaisi, I. Wang, B. Zhang, A. Khilo, C. V. Baiocco, M. A. Popović, V. M. Stojanović, R. J. Ram. Integrating photonics with silicon nanoelectronics for the next generation of systems on a chip. Nature, 556, 349-354(2018).