LiNbO3 channel and ridge waveguides based on helium ion implantation combined with lithography and precise diamond dicing

Sumei Wang; Jinhua Zhao; Jinjun Gu; Mingyang Bu; Li Fan; Shuang Li; Xifeng Qin; Yicun Yao; Yingying Ren; Lei Wang

doi:10.3788/COL202220.071301

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