LiNbO<sub>3</sub> channel and ridge waveguides based on helium ion implantation combined with lithography and precise diamond dicing

Sumei Wang; Jinhua Zhao; Jinjun Gu; Mingyang Bu; Li Fan; Shuang Li; Xifeng Qin; Yicun Yao; Yingying Ren; Lei Wang

doi:10.3788/COL202220.071301

Journals >Chinese Optics Letters >Volume 20 >Issue 7 >Page 071301 > Article

Chinese Optics Letters
Vol. 20, Issue 7, 071301 (2022)

LiNbO₃ channel and ridge waveguides based on helium ion implantation combined with lithography and precise diamond dicing

Sumei Wang¹, Jinhua Zhao^1、*, Jinjun Gu¹, Mingyang Bu¹, Li Fan¹, Shuang Li¹, Xifeng Qin¹, Yicun Yao², Yingying Ren³, and Lei Wang⁴

Author Affiliations

¹School of Science, Shandong Jianzhu University, Jinan 250101, China

²Shandong Key Laboratory of Optical Communication Science and Technology, School of Physical Science and Information Technology, Liaocheng University, Liaocheng 252059, China

³Shandong Provincial Engineering and Technical Center of Light Manipulations & Shandong Provincial Key Laboratory of Optics and Photonic Device, School of Physics and Electronics, Shandong Normal University, Jinan 250014, China

⁴School of Physics, Shandong University, Jinan 250100, China

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DOI: 10.3788/COL202220.071301 Cite this Article

Sumei Wang, Jinhua Zhao, Jinjun Gu, Mingyang Bu, Li Fan, Shuang Li, Xifeng Qin, Yicun Yao, Yingying Ren, Lei Wang. LiNbO₃ channel and ridge waveguides based on helium ion implantation combined with lithography and precise diamond dicing[J]. Chinese Optics Letters, 2022, 20(7): 071301 Copy Citation Text

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Abstract

Lithium niobate (

{LiNbO}_{3}

, LN) channel and ridge waveguides have been successfully fabricated by He ion implantation, which has energy of 500 keV and fluence of

1.5 \times 10^{16} ions / {cm}^{2}

and is combined with lithography and the precise diamond dicing technique. The refractive index profile of the annealed LN planar waveguide was reconstructed. The propagation loss of the channel waveguide with a width of 10 µm and that of the ridge waveguides with widths of 25 µm and 15 µm were investigated by the end-face coupling method. In our work, the factors that affect the waveguide properties of channel and ridge waveguides were revealed.

Keywords

channel waveguide ion implantation lithium niobate ridge waveguide waveguides

1. Introduction

In recent decades, lithium niobate ( ${LiNbO}_{3}$ , LN), with an oxygen octahedral structure, has been applied in photonic industry and considered to be optical “silicon”^[1,2] for its unique properties—namely excellent electro-optic, nonlinear optical properties, wide transparency window, exceptional signal quality, and good temperature stability^[3,4]. The LN on insulator (LNOI) platform promises to combine the excellent nonlinear properties of LN crystal with high contrast waveguides^[5]. Recent progress in the fabrication technique has enabled ultra-low loss thin film LN waveguides, which is revolutionizing not only the LN industry, but also the field of large-scale photonic integration^[6]. As a result, the LN crystals are found in a wide range of experiments and optical devices^[2], so they were researched in this paper.