Sumei Wang, Jinhua Zhao, Jinjun Gu, Mingyang Bu, Li Fan, Shuang Li, Xifeng Qin, Yicun Yao, Yingying Ren, Lei Wang. LiNbO3 channel and ridge waveguides based on helium ion implantation combined with lithography and precise diamond dicing[J]. Chinese Optics Letters, 2022, 20(7): 071301
- Chinese Optics Letters
- Vol. 20, Issue 7, 071301 (2022)
Fig. 1. Fabrication methods of LN waveguides: (a) channel guide; (b) ridge guide.
Fig. 2. (a) Dpa profile of 500 keV He ions with the fluence of 1.5 × 1016 ions/cm2 implanted into LN crystal by SRIM 2013; (b) reconstructed RIP of the LN waveguide after annealing at 260°C for 30 min at 633 nm.
![(a) Profile of the TM0 guided mode simulated by BPM [one-dimensional (1D)]; (b) the modal intensity profile of TM0 mode computed by the BPM (2D); (c) near-field image of the TM0 mode by use of the end-face coupling method.](/Images/icon/loading.gif){kind=icon}
Fig. 3. (a) Profile of the TM0 guided mode simulated by BPM [one-dimensional (1D)]; (b) the modal intensity profile of TM0 mode computed by the BPM (2D); (c) near-field image of the TM0 mode by use of the end-face coupling method.
Fig. 4. Optical microscope image (×500) of the end face of waveguides after polishing: (a) WG10; (b) WG15; (c) WG25.
Fig. 5. Reconstructed RIP of the waveguide: (a) WG10; (b) WG15.
Fig. 6. (a)–(c) Near-field image of WG10 quasi-TM modes from the end face of the sample captured by a CCD camera; (d)–(f) modal intensity profile computed by finite difference (FD)-BPM: quasi-TM00, TM10, TM20 modes. The color scale, which represents the relative light intensity, is shown also.
Fig. 7. (a)–(c) Near-field image of WG15 quasi-TM modes from the end face of the sample captured by a CCD camera; (d)–(f) modal intensity profile computed by FD-BPM. The color scale, which represents the relative light intensity, is shown also.
Fig. 8. Experimental setup used with the end-face coupling method. Obj, microscope objective lens; location 1, the first position where the light power was measured; location 2, the second position where the light power was measured.
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Table 1. Coupling Efficiencies and Propagation Losses of the 2D Waveguides at 633 nm for TM Polarization
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