• Infrared and Laser Engineering
  • Vol. 49, Issue 4, 0413005 (2020)
Dong’e Zhao1、2, Siyu Wang1, Yayun Ma1, Bin Zhang1、2, Nuolun Li1, Yuan Li1、2, and Wenbo Chu1、2
Author Affiliations
  • 1School of Information and Communication Engineering, North University of China, Taiyuan 030051, China
  • 2State Key Laboratory of Electronic Testing Technology, North University of China, Taiyuan 030051, China
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    DOI: 10.3788/IRLA202049.0413005 Cite this Article
    Dong’e Zhao, Siyu Wang, Yayun Ma, Bin Zhang, Nuolun Li, Yuan Li, Wenbo Chu. Measurement of micro-displacement based on the interference of vortex beams and spherical wave[J]. Infrared and Laser Engineering, 2020, 49(4): 0413005 Copy Citation Text show less
    Simulation flow chart of measuring micro-displacement based on the theory of vortex beams and spherical wave interference
    Fig. 1. Simulation flow chart of measuring micro-displacement based on the theory of vortex beams and spherical wave interference
    Interference intensity of vortex beams and spherical wave before and after micro-displacement in the simulation
    Fig. 2. Interference intensity of vortex beams and spherical wave before and after micro-displacement in the simulation
    Subtractive intensity distribution of the interferogram before and after the micro-displacement of the object in the simulation
    Fig. 3. Subtractive intensity distribution of the interferogram before and after the micro-displacement of the object in the simulation
    Tangent line of the spiral fringe before and after micro-displacement of object in the simulation
    Fig. 4. Tangent line of the spiral fringe before and after micro-displacement of object in the simulation
    Experimental set up for measuring micro-displacement of objects based on vortex beams and spherical wave interferometry
    Fig. 5. Experimental set up for measuring micro-displacement of objects based on vortex beams and spherical wave interferometry
    Interference fringes of vortex and spherical waves in the experiment. (a) Interference pattern before the displacement of the piezoelectric ceramics , (b) Interference pattern after the displacement of the piezoelectric ceramics
    Fig. 6. Interference fringes of vortex and spherical waves in the experiment. (a) Interference pattern before the displacement of the piezoelectric ceramics , (b) Interference pattern after the displacement of the piezoelectric ceramics
    MATLAB processing results of experimental image. (a) Subtractive intensity distribution of the interferogram before and after the micro-displacement, (b) Tangent of the spiral fringe before the micro-displacement, (c) Tangent of the spiral fringe after the micro-displacement
    Fig. 7. MATLAB processing results of experimental image. (a) Subtractive intensity distribution of the interferogram before and after the micro-displacement, (b) Tangent of the spiral fringe before the micro-displacement, (c) Tangent of the spiral fringe after the micro-displacement
    Displacement of theory/nm52.73237.30316.40
    Rotation angle of theory/(°)30135180
    Rotation angle of simulation/(°)30.79136.39180
    Displacement of calculation/nm54.12239.74316.40
    Error/nm1.372.440
    Table 1. Measurement results of simulation
    Dong’e Zhao, Siyu Wang, Yayun Ma, Bin Zhang, Nuolun Li, Yuan Li, Wenbo Chu. Measurement of micro-displacement based on the interference of vortex beams and spherical wave[J]. Infrared and Laser Engineering, 2020, 49(4): 0413005
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