• Infrared and Laser Engineering
  • Vol. 49, Issue 4, 0413005 (2020)
Dong’e Zhao1、2, Siyu Wang1, Yayun Ma1, Bin Zhang1、2, Nuolun Li1, Yuan Li1、2, and Wenbo Chu1、2
Author Affiliations
  • 1School of Information and Communication Engineering, North University of China, Taiyuan 030051, China
  • 2State Key Laboratory of Electronic Testing Technology, North University of China, Taiyuan 030051, China
  • show less
    DOI: 10.3788/IRLA202049.0413005 Cite this Article
    Dong’e Zhao, Siyu Wang, Yayun Ma, Bin Zhang, Nuolun Li, Yuan Li, Wenbo Chu. Measurement of micro-displacement based on the interference of vortex beams and spherical wave[J]. Infrared and Laser Engineering, 2020, 49(4): 0413005 Copy Citation Text show less

    Abstract

    Based on the theory of vortex beams and spherical wave interference, an optical measurement method for object micro-displacement was proposed. After improving the Mach-Zehnder interference optical path, a vortex beam was generated as a reference beam, using the spatial light modulator illuminated by a beam of light, and another beam was transformed into a spherical wave through the lens and illuminated to the object. The interference fringes were distributed in a spiral shape as the two beams interfered. When the object has a micro-displacement, the optical path difference of the two beams changes, and the spiral interference fringe rotates. Noticing this phenomenon, the micro-displacement of the object can be determined by the rotation angle of the spiral interference which vortex beams interference with spherical wave. Through theoretical analysis, simulation and experiments have proved that the micro-displacement of the object can be monitored in real time, and effectively calculated by the rotation angle change of spiral fringe based on interference of vortex beams and spherical wave. In the experiment, the displacement of the measured object is 27 nm, the actual measured displacement of the object is 25.75 nm, and the error is 1.25 nm compared with the theoretical value.
    Dong’e Zhao, Siyu Wang, Yayun Ma, Bin Zhang, Nuolun Li, Yuan Li, Wenbo Chu. Measurement of micro-displacement based on the interference of vortex beams and spherical wave[J]. Infrared and Laser Engineering, 2020, 49(4): 0413005
    Download Citation