Review on Silicon-Based Microdisplay Chips

Yixing Chen^1,2 and Jun Xia^1,*

Author Affiliations

¹Joint International Research Laboratory of Information Display and Visualization, Southeast University, Nanjing 210096, Jiangsu, China

²Nanjing Smartvision Electronics Co., Ltd., Nanjing 210032, Jiangsu, China

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DOI: 10.3788/LOP202259.2011006 Cite this Article Set citation alerts

Yixing Chen, Jun Xia. Review on Silicon-Based Microdisplay Chips[J]. Laser & Optoelectronics Progress, 2022, 59(20): 2011006 Copy Citation Text

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Fig. 1. Structure of LCoS^[12]

Fig. 2. Manufacturing process of LCoS^[9]

Fig. 3. Analog pixel driving circuit and digital pixel driving circuit of LCoS^[20-21]

Fig. 4. OLED structure

Fig. 5. Technological process of OLED on silicon^[36]

Fig. 6. Analog driving circuit and digital driving circuit of OLED on silicon^[44-45]

Fig. 7. Analog driving circuit and digital driving circuit of micro LED on silicon^[62]

Parameter	Ref.［48］	Ref.［68］	Ref.［69］	Ref.［56］	Ref.［51］	Ref.［64］
Current density /（ $A$ ·cm^-2）	0.7	6	12	50	0.41	2.7
Pixel pitch	15 μm pitch （12 μm pixel）	5 μm	10 μm pitch （6.5 μm pixel）	20 μm pitch （10 μm pixel）	8×24 μm	30 μm pitch （20 μm pixel）
Resolution	640×480	1280×3×720	873×500	640×480	352×198×3	400×240
PPI	1695	5080	2540	1270	1053	848
Average power consumption	800 mW	138.8 mW			700 mW	1.17 W

Table 1. Parameters of silicon-based part in micro LED related literature

Display	Maturity	Maximum resolution	Power consumption	Form factor	Smallest pixel pitch	Contrast ratio
LCoS	High	8K	0.1-0.5 W	Large	3.015 μm	~10³∶1
DLP	High	2716×1528	0.2-1 W	Large	5.4 μm	~10³∶1
Micro OLED	Medium	2560×2560	0.001-0.5 W	Small	6.3 μm	~10⁵∶1
Micro LED	Low	960×540	0.01-0.5 W	Small	5 μm	~10⁵∶1
LBS	Medium	1920×1080	>0.1 W	Small	Unavailable	~10⁵∶1