[1] Bradley R M, Harper J M E. Theory of ripple topography induced by ion bombardment[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 6, 2390-2395(1988).
[2] Norris S A, Aziz M J. Ion-induced nanopatterning of silicon: toward a predictive model[J]. Applied Physics Reviews, 6, 011311(2019).
[3] Camellini A, Mazzanti A, Mennucci C et al. Evidence of plasmon enhanced charge transfer in large-area hybrid Au-MoS2 metasurface[J]. Advanced Optical Materials, 8, 2000653(2020).
[4] Cuerno R, Kim J S. A perspective on nanoscale pattern formation at surfaces by ion-beam irradiation[J]. Journal of Applied Physics, 128, 180902(2020).
[5] Yuan Y, Yang W L, Sang J Q et al. Periodic nano ripple fabricated on diamond and its structure damage repair[J]. Diamond and Related Materials, 120, 108670(2021).
[6] Chen Z L, Liu W G. Nanodots pattern and optical properties of monocrystalline silicon induced by low energy ion beam[J]. Acta Optica Sinica, 33, 0922003(2013).
[7] Huang Q S, jia Q, Feng J T et al. Realization of wafer-scale nanogratings with sub-50 nm period through vacancy epitaxy[J]. Nature Communications, 10, 2437(2019).
[8] Yang G Y, Cai M Q, Li J Y et al. Preparation of subwavelength nanostructures based on low-energy ion bombardment[J]. Acta Optica Sinica, 40, 1736001(2020).
[9] Luo J Y, Guo Z, Huang H et al. Synchrotron radiation research on diffraction efficiency of multilayer coated grating[J]. Acta Optica Sinica, 41, 1405001(2021).
[10] Yang Y, Keller A. Ion beam nanopatterning of biomaterial surfaces[J]. Applied Sciences, 11, 6575(2021).
[11] Civantos A, Barnwell A, Shetty A R et al. Designing nanostructured Ti6Al4V bioactive interfaces with directed irradiation synthesis toward cell stimulation to promote host-tissue-implant integration[J]. ACS Biomaterials Science & Engineering, 5, 3325-3339(2019).
[12] Lu M, Wang Z L, Zhang S Q et al. Polarization scattering characterization and discrimination principle of surface defects[J]. Acta Optica Sinica, 41, 1229001(2021).
[13] Tian W. Study on optical wave scattering from the random rough surfaces[D], 7-17(2009).
[14] Zhang S M, Zhu J T, Wang F L et al. Combination of surface characterization techniques for analyzing the roughness of the substrate[J]. Optical Instruments, 28, 137-140(2006).
[15] Ulyanenkov A, Chrost J, Siffalovic P et al. GISAXS and AFM study of self-assembled Fe2O3 nanoparticles and Si nanodots[J]. Physica Status Solidi (a), 208, 2619-2622(2011).
[16] Myint P, Ludwig K F, Wiegart L et al. De Gennes narrowing and relationship between structure and dynamics in self-organized ion-beam nanopatterning[J]. Physical Review Letters, 126, 016101(2021).
[17] Soltwisch V, Burger S, Scholze F. Scatterometry sensitivity analysis for conical diffraction versus in-plane diffraction geometry with respect to the side wall angle[J]. Proceedings of SPIE, 8789, 878905(2013).
[18] Soltwisch V, Wernecke J, Haase A et al. Determination of line profiles on nano-structured surfaces using EUV and X-ray scattering[J]. Proceedings of SPIE, 9235, 92351D(2014).
[19] Herrero A F, Pflüger M, Puls J et al. Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering[J]. Optics Express, 29, 35580-35591(2021).
[20] Ou X, Heinig K H, Hübner R et al. Faceted nanostructure arrays with extreme regularity by self-assembly of vacancies[J]. Nanoscale, 7, 18928-18935(2015).
[21] Jo S, Jun J, Lee E et al. Order improvement of surface nanopatterns via substrate rocking under ion bombardment: experiments and nonlinear models[J]. Physical Review B, 102, 045421(2020).
[22] Li J Y, Yang G Y, Bradley R M et al. Enhancing the quality of self-organized nanoripples by Ar-ion bombardment of a bilayer system[J]. Nanotechnology, 32, 385301(2021).
[23] Liu Y, Li J Y, Yang G Y et al. A method for the fabrication of ordered self-organized nanostructures based on a bi-layer system[P].
[24] Zhang K, Bobes O, Hofsäss H. Designing self-organized nanopatterns on Si by ion irradiation and metal co-deposition[J]. Nanotechnology, 25, 085301(2014).
[25] Yang G Y, Hirsch D, Li J Y et al. Energy dependence of morphologies on photoresist surfaces under Ar+ ion bombardment with normal incidence[J]. Applied Surface Science, 523, 146510(2020).
[26] Sheng B, Xu X D, Liu Y et al. Vacuum-ultraviolet blazed silicon grating anisotropically etched by native-oxide mask[J]. Optics Letters, 34, 1147-1149(2009).
[27] Lin H, Zhang L C, Jin C S et al. Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region[J]. Chinese Optics Letters, 7, 180-182(2009).
[28] Lin D K, Liu Z K, Dietrich K et al. Soft X-ray varied-line-spacing gratings fabricated by near-field holography using an electron beam lithography-written phase mask[J]. Journal of Synchrotron Radiation, 26, 1782-1789(2019).
[29] Feng J T, Huang Q S, Qi R Z et al. Stability of Cr/C multilayer during synchrotron radiation exposure and thermal annealing[J]. Optics Express, 27, 38493-38508(2019).
[30] Li Q L, Yang Y, Wei Y Q et al. Optical properties of boron carbide thin films with different B/C molar ratio[J]. Materials Reports, 35, 2006-2011(2021).
[31] Li Y P, Li R N, Bian H M et al. Photonic crystal films with high reflectance based on mesoporous silica in the extreme ultraviolet range[J]. Optics Communications, 474, 126110(2020).
[32] Guo P L. Study on fabrication of convex grating by native substrate grating mask[D], 13(2018).