Characterization of Ion Beam Induced Nanoripples by Using Extreme Ultraviolet Synchrotron Radiation

Jinyu Li; Gaoyuan Yang; Haofeng Zang; Huoyao Chen; Tonglin Huo; Hongjun Zhou; Yonghua Lu; Ying Liu; Yilin Hong; Shaojun Fu

doi:10.3788/AOS202242.1936001

Journals >Acta Optica Sinica >Volume 42 >Issue 19 >Page 1936001 > Article

Acta Optica Sinica
Vol. 42, Issue 19, 1936001 (2022)

Characterization of Ion Beam Induced Nanoripples by Using Extreme Ultraviolet Synchrotron Radiation

Jinyu Li¹, Gaoyuan Yang¹, Haofeng Zang², Huoyao Chen¹, Tonglin Huo¹, Hongjun Zhou¹, Yonghua Lu², Ying Liu^1、*, Yilin Hong¹, and Shaojun Fu¹

Author Affiliations

¹National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, Anhui , China

²Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei 230026, Anhui , China

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DOI: 10.3788/AOS202242.1936001 Cite this Article Set citation alerts

Jinyu Li, Gaoyuan Yang, Haofeng Zang, Huoyao Chen, Tonglin Huo, Hongjun Zhou, Yonghua Lu, Ying Liu, Yilin Hong, Shaojun Fu. Characterization of Ion Beam Induced Nanoripples by Using Extreme Ultraviolet Synchrotron Radiation[J]. Acta Optica Sinica, 2022, 42(19): 1936001 Copy Citation Text

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Fig. 1. Schematic diagram of EUV scatterometry

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AFM results and corresponding Fourier transform images of samples A, B, C, and D. (a)-(d) AFM results with area of 25 μm2; (e)-(h) Fourier transform images corresponding to Figs. 2(a)-(d)

Fig. 2. AFM results and corresponding Fourier transform images of samples A, B, C, and D. (a)-(d) AFM results with area of 25 μm²; (e)-(h) Fourier transform images corresponding to Figs. 2(a)-(d)

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