• Acta Optica Sinica
  • Vol. 32, Issue 4, 412002 (2012)
Xu Xinhua1、*, Wang Qing1, Song Bo2, and Fu Ying1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/aos201232.0412002 Cite this Article Set citation alerts
    Xu Xinhua, Wang Qing, Song Bo, Fu Ying. Measurement System of Optical Homogeneity of Large-Size Optical Material Based on Subaperture Stitching Technique[J]. Acta Optica Sinica, 2012, 32(4): 412002 Copy Citation Text show less

    Abstract

    In order to realize high-precision, low-cost measurement of optical refractive-index homogeneity of large-size optical material, an interference absolute testing method based on subaperture stitching technique is proposed and a measurement system comprised of a Zygo interferometer, a sophisticated five-dimensional adjustment air-floatation platform, subaperture stitching software and a computer is developed. The optical component under test is placed on the five-dimensional adjustment platform and all subaperture areas of the component can be measured precisely by moving the platform. Then optical-homogeneity distribution of the whole optical component is calculated out automatically by subaperture stitching software. In the experiment, a 300 mm quartz optical component is measured in stitching mode of eight subapertures by using a 180 mm interferometer. The stitching result is compared with the direct measurement result obtained by using full-aperture interferometer. The relative error of wavefront peak-to-valley value is 0.21%, the relative error of optical homogeneity value is 0.23%. This precision can be compared with the precision of directly measured result. The practicability of subaperture stitching technology of plane-type wavefront measured by using absolute test method is realized. The whole system integrates optics, mechanics, electrics and computer together and can be operated conveniently with high accuracy.
    Xu Xinhua, Wang Qing, Song Bo, Fu Ying. Measurement System of Optical Homogeneity of Large-Size Optical Material Based on Subaperture Stitching Technique[J]. Acta Optica Sinica, 2012, 32(4): 412002
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