Application of terahertz mapping in high throughput measurement of the electrical conductance of Cu alloy thin films (Invited)

Yu Zhu; Shihan Yan; Ziyi Zang; Shengxing Song; Jie Wang; Zhanqiang Ru; Hongliang Cui; Helun Song

doi:10.3788/IRLA20210942

[1] A Stein, S W Keller, T E Mallouk. Turning down the heat: Design and mechanism in solid-state synthesis. Science, 259, 1558-1564(1993).

[2] X D Xiang, X Sun, G Briceño, et al. A combinatorial approach to materials discovery. Science, 268, 1738-1740(1995).

[3] S Barcelo, S S Mao. High throughput optical characterization of alloy hydrogenation. International Journal of Hydrogen Energy, 13, 7228-7231(2010).

[4] H Koinuma, I Takeuchi. Combinatorial solid-state chemistry of inorganic materials. Nature Mater, 3, 429-438(2004).

[5] Yexin Jiang, Huafen Lou, Haofeng Xie, et al. Development status and prospects of advanced copper alloy. Strategic Study of CAE, 22, 84-92(2020).

[6] D H Petersen. Electrical characterization of InGaAs ultra-shallow junctions. Journal of Vacuum Science & Technology B, 28, C1C41(2010).

[7] T Clarysse, D Vanhaeren, I Hoflijk, et al. Characterization of electrically active dopant profiles with the spreading resistance probe. Materials Science and Engineering:R, 47, 123-206(2004).

[8] V A Sandovskii, V V Dyakin, M S Dudarev. A procedure for measuring and validating samples of electrical conductivity. Meas Tech, 48, 925-933(2005).

[9] D H Petersen. Review of electrical characterization of ultra-shallow junctions with micro four-point probes. Journal of Vacuum Science & Technology B, 28, C1C27(2010).

[10] B Ferguson, X C Zhang. Materials for terahertz science and technology. Nature Materials, 1, 26-33(2002).

[11] N Laman, D Grischkowsky. Terahertz conductivity of thin metal films. Appl Phys Lett, 93, 051105(2008).

[12] J D Buron, D H Petersen, P Bøggild, et al. Graphene conductance uniformity mapping. Nano Lett, 12, 5074-5081(2012).

[13] J D Buron, F Pizzocchero, P Bøggild, et al. Graphene mobility mapping. Scientific Reports, 5, 12305(2015).

[14] J Lloyd-Hughes, Tae-In Jeon. A review of the terahertz conductivity of bulk and nano-materials. J Infrared Milli Terahertz Waves, 33, 871-925(2012).

[15] Lantao Guo, Kaijun Mu, Chao Deng, et al. Terahertz spectroscopy and imaging. Infrared and Laser Engineering, 42, 51-56(2013).

[16] S H Yan, D S Wei, M J Tang, et al. Determination of critical micelle concentrations of surfactants by terahertz time-domain spectroscopy. IEEE Transactions on Terahertz Science and Technology, 6, 532-540(2016).

[17] Pawlak B J, Jones K S, Felch S B, et al. Materials Research Society Symposium Proceedings Vol, 912: Doping engineering f device fabrication[M]. New Yk: Cambridge University Press, 2006: 197202.

[18] Zaoxia Li, Shihan Yan, Ziyi Zang, et al. Single cell imaging with near-field terahertz scanning microscopy. Cell Proliferation, 53, e12788(2020).

[19] M P Kirley, J H Booske. Terahertz conductivity of copper surfaces. IEEE Transcations on Terahertz Science and Technology, 5, 1012-1020(2015).