Fig. 1. Illustration of the high throughput materials chip fabrication method with electron beam deposition. (a) 12×12 mask of 3 patterns; (b) Illustration of the in site discrete mode process; (c) System setup for e-beam source, mask and sample stage; (d) Illustration of the ternary continuous gradient process; (e) Illustration of heat treatment process

Fig. 2. (a) Illustration of the THz mapping detection system in transmission mode; (b) THz time-domain spectra of the periodic temporal signals from multiple internal reflections; (c) Experimental setup of the THz emitter, the sample stage and the photoconductive detector

Fig. 3. (a)-(c) Optical images of the samples; (d)-(f) THz conductance imaging of the corresponding samples; (g) Comparison of metal film conductance obtained by different test methods

Fig. 4. (a) Cu thin film sample photo on high resistivity Si substrate; (b) THz conductance mapping image; (c) THz conductance variations of the sample spots; (d) Anisotropic variations along the horizontal direction of Fig.(a) and (b); (e) Anisotropic variations along the vertical direction of Fig.(a) and (b)

Fig. 5. Cu-Al₂O₃/Ag/Mg alloy thin film sample fabricated with the continuous gradient mode. (a) Optical image of the sample; (b) THz mapping imaging, scale bar=4 mm; (c) Comparison between the conductance trend of the 15 points marked in Fig.(b) obtained from THz and 4-point probe respectively

Fig. 6. Cu-Al₂O₃/Ag/Mg alloy thin film sample fabricated with the in site discrete mode. (a) Optical image of the sample; (b) THz mapping imaging; (c) Simulated combination of the thickness and positions of the constituents; (d) Index table of the sample spots; (e) Deposition parameters of multi-layer film

Fig. 7. SEM images of the 12×12 Cu-Al₂O₃/Ag/Mg Cu alloy thin film samples array, scale bar=100 μm

Fig. 8. (a) Relationship between the THz mapping conductance and that of the weight percentage of the samples constituents from column 164-214; (b) SEM microstructure morphology of representative sample spots with different conductance

Table 1. Conductance value of metal films

Table 2. Constituents of the sample fabricated using the continuous gradient mode

Table 3. Conductance of the selected 15 points along the thickness gradients of Ag, Mg and Al₂O₃ using 4-point probe and THz methods respectively

Table 4. THz conductance value of the in site discrete 12×12 Cu-Al₂O₃/Ag/Mg alloy sample library

Table 5. Comparison of THz conductance and the weight percentage of oxygen of representative sample spots

Table 6. THz conductance and weight percentages of the constituents of sample spots in column #164-#214

Table 7. Advantages of THz scanning method vs. 4-point probe