Ming Wang, Yanchang Zheng, Zhengkun Liu, Xinpu Wu, Zhiwen Chen, Hai Wang, Yilin Hong. Meniscus and Spin Coating Methods for Coating SiO2 Sol-Gel Antireflective Film on Beam Sampling Grating[J]. Laser & Optoelectronics Progress, 2022, 59(1): 0105001
- Laser & Optoelectronics Progress
- Vol. 59, Issue 1, 0105001 (2022)
Fig. 1. Schematic of meniscus coating
Fig. 2. Schematic of spin coating
Fig. 3. Microscope images of grating surface after coating. (a) Meniscus coating; (b) spin coating
Fig. 4. Profiler images of grating surface after coating. (a) Profiler image after meniscus coating; (b) profiler image after spin coating
Fig. 5. AFM images of grating surface before and after coating. (a) AFM image before coating; (b) AFM image after meniscus coating; (c) AFM image after spin coating
Fig. 6. Structure schematic of the grating surface coated with sol-gel film
Fig. 7. Diffraction efficiency versus film thickness
Fig. 8. Schematic of measuring diffraction efficiency
Fig. 9. Optical path of measuring diffraction efficiency
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Table 1. Film thickness obtained by multiple meniscus coating and spin coating
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Table 2. Effect of coating sol-gel antireflective film on diffraction efficiency of BSG
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