Meniscus and Spin Coating Methods for Coating SiO2 Sol-Gel Antireflective Film on Beam Sampling Grating

Ming Wang; Yanchang Zheng; Zhengkun Liu; Xinpu Wu; Zhiwen Chen; Hai Wang; Yilin Hong

doi:10.3788/LOP202259.0105001

Journals >Laser & Optoelectronics Progress >Volume 59 >Issue 1 >Page 0105001 > Article

Laser & Optoelectronics Progress
Vol. 59, Issue 1, 0105001 (2022)

Meniscus and Spin Coating Methods for Coating SiO₂ Sol-Gel Antireflective Film on Beam Sampling Grating

Ming Wang¹, Yanchang Zheng^2、*, Zhengkun Liu², Xinpu Wu², Zhiwen Chen², Hai Wang¹, and Yilin Hong²

Author Affiliations

¹School of Mechanical Engineering, Anhui Polytechnic University, Wuhu , Anhui 241000, China

²National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei , Anhui 230029, China

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DOI: 10.3788/LOP202259.0105001 Cite this Article Set citation alerts

Ming Wang, Yanchang Zheng, Zhengkun Liu, Xinpu Wu, Zhiwen Chen, Hai Wang, Yilin Hong. Meniscus and Spin Coating Methods for Coating SiO₂ Sol-Gel Antireflective Film on Beam Sampling Grating[J]. Laser & Optoelectronics Progress, 2022, 59(1): 0105001 Copy Citation Text

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