WU Yang, YI Li-xin, WANG Shen-wei, DU Yu-fan, HUANG Sheng, JI Guo-rui, WANG Yong-sheng. Deposition and Structures Analysis of Amorphous SiNx Films Prepared by Magnetron Sputtering[J]. Spectroscopy and Spectral Analysis, 2009, 29(5): 1260
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