Author Affiliations
College of Mechanical Engineering and Automation, Huaqiao University, Xiamen, Fujian 361021, Chinashow less
Fig. 1. Schematic diagram of DPP
Fig. 2. Mould of DPP
Fig. 3. Preparation process. (a) Basic plate; (b) basic plate with non-abrasive layer; (c) adding abrasive layer and putting it into the mold; (d) demoulding forming
Fig. 4. Two test pads. (a) DPP; (b) GGP
Fig. 5. Morphologies of the workpiece processed by two kinds of pads. (a) Surface morphology of the workpiece processed by GGP; (b) surface morphology of the workpiece processed by GGP
Fig. 6. Extraction of surface defects on the workpiece. (a) Original morphology of workpiece; (b) morphology of workpiece after defect extraction
Fig. 7. Surface roughness of sapphire substrate polished by different pads. (a) Influence of rotational speed ratio on surface roughness; (b) influence of pressure on surface roughness
Fig. 8. PV of sapphire substrate polished by different pads. (a) Effect of rotational speed ratio on PV; (b) effect of pressure on PV
Fig. 9. Material removal under different polishing parameters. (a) Effect of rotational speed ratio on material removal rate; (b) effect of pressure on material removal rate
Fig. 10. Removal thickness distribution of GGP and DPP. (a) Removal thickness distribution of GGP; (b) removal thickness distribution of DPP
Fig. 11. Surface morphologies of the two pads. (a) Surface morphologies of GGP; (b) surface morphologies of DPP
Fig. 12. Morphology of the FAP. (A) Original morphology of the FAP; (b) extraction of debris from the FAP
Fig. 13. Schematic diagram of abrasive debris flow in two kinds of groove plates. (a) Schematic diagram of abrasive debris flow in GPP; (b) schematic diagram of abrasive flow in DPP
Pad speed /(r·min-1) | Rotational speed ratio | Pressure /kg | Eccentricity /mm | Lapping time /min |
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60 | 0.7,0.8,0.9,1.0,1.1,1.2,1.3 | 2g,3g,4g,5g,6g,7g | 85 | 20 | Note: g is gravitational acceleration. | |
|
Table 1. Experimental parameters