• Journal of Infrared and Millimeter Waves
  • Vol. 29, Issue 6, 415 (2010)
YE Zhen-Hua1、*, YIN Wen-Ting1、2, HUANG Jian1、2, HU Wei-Da1, CHEN Lu1, LIAO Qin-Jun1, CHEN Hong-Lei1, LIN Chun1, HU Xiao-Ning1, DING Rui-Jun1, and HE Li1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    YE Zhen-Hua, YIN Wen-Ting, HUANG Jian, HU Wei-Da, CHEN Lu, LIAO Qin-Jun, CHEN Hong-Lei, LIN Chun, HU Xiao-Ning, DING Rui-Jun, HE Li. 128×128 SW/MW TWO-COLOR HgCdTe IRFPAs[J]. Journal of Infrared and Millimeter Waves, 2010, 29(6): 415 Copy Citation Text show less

    Abstract

    The results of 128×128 SW/MW two-color HgCdTe infrared focal plane arrays (IRFPAs) were presented. By B+-implantation, mesa-isolation etching, side-wall passivation, side-wall metallization and flip-chip hybridization with readout integrated circuit (ROIC),128×128 SW/MW two-color HgCdTe IRFPAs detector was fabricated from a four-layer p-p-P-N hetero-junction of Hg1-xCdxTe film grown by molecular beam epitaxy and in-situ doping techniques. The micro-mesa fill-factor of (50×50)μm2 two-color detector arrays was doubled by optimizing the wet-chemical etching process. The staring SW/MW two-color HgCdTe IRFPAs detector performed high uniformity and normal photo-electric properties. At liquid nitrogen temperature, the cut-off wavelengths of the two-color IRFPAs were 2.7μm and 4.9μm, respectively, and the peak detectivities (D*λp) were 1.42×1011cmHz1/2/W and 2.15×1011cmHz1/2/W respectively.
    YE Zhen-Hua, YIN Wen-Ting, HUANG Jian, HU Wei-Da, CHEN Lu, LIAO Qin-Jun, CHEN Hong-Lei, LIN Chun, HU Xiao-Ning, DING Rui-Jun, HE Li. 128×128 SW/MW TWO-COLOR HgCdTe IRFPAs[J]. Journal of Infrared and Millimeter Waves, 2010, 29(6): 415
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