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    Journals >Acta Optica Sinica >Volume 32 >Issue 3 >Page 322005 > Article
    • Acta Optica Sinica
    • Vol. 32, Issue 3, 322005 (2012)
    Thermal and Structural Deformation of Projection Optics and Its Influence on Optical Imaging Performance for 22 nm Extreme Ultraviolet Lithography
    Yang Guanghua* and Li Yanqiu
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    DOI: 10.3788/aos201232.0322005 Cite this Article Set citation alerts
    Yang Guanghua, Li Yanqiu. Thermal and Structural Deformation of Projection Optics and Its Influence on Optical Imaging Performance for 22 nm Extreme Ultraviolet Lithography[J]. Acta Optica Sinica, 2012, 32(3): 322005 Copy Citation Text show less
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    Yang Guanghua, Li Yanqiu. Thermal and Structural Deformation of Projection Optics and Its Influence on Optical Imaging Performance for 22 nm Extreme Ultraviolet Lithography[J]. Acta Optica Sinica, 2012, 32(3): 322005
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