Xu Liu, Cuifang Kuang. High Throughput Laser Nano Direct Writing Technique[J]. Acta Optica Sinica, 2022, 42(17): 1714005
- Acta Optica Sinica
- Vol. 42, Issue 17, 1714005 (2022)
![LDW with two laser beams[15-21]](/richHtml/gxxb/2022/42/17/1714005/img_02.jpg)
![Multi-channels LDW technique[24-27]](/richHtml/gxxb/2022/42/17/1714005/img_03.jpg)
![Principle of TP-LDW, PPI-LDW, and multi-channel PPI-LDW[30]](/Images/icon/loading.gif){kind=icon}
Fig. 3. Principle of TP-LDW, PPI-LDW, and multi-channel PPI-LDW[30]
Fig. 4. Jablonski plot of PPI photoresist (Rim-P) and two writing mode (oil mode & dip-in mode)
Fig. 5. 3D hollow spot. (a) Schematic of 3D hollow spot modulated with SLM; (b) modulation module of 3D hollow spot; (c) intensity distribution of 3D hollow spot in front focal plane of objective lens; (d) linewidth corresponding to inhibition laser off or on
Fig. 6. Beam stabilization. (a) Schematic of beam stabilization module; (b) position and (c) angle drift of beam without drift control;(d) position and (e) angle drift of beam with drift control
Fig. 7. Six channels LDW. (a) Schematic of six channels LDW system; (b) CAD module corresponding to Fig. 7(a), the inset is photo of real product; (c) six channels excitation and inhibition beams generated by SLM
Fig. 8. Different micro/nano-structure devices written by PPI-LDW
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Table 1. Chemical components and photophysical performance for Rim-P series photoresist
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