Zhiyong Shi, Liqiang Zhou, Lichun Zhang, Zhigang Li, Qiang Shi, Linwei Zhu. Dynamic Laser Parallel Fabrication Based on Multifocal Array[J]. Acta Optica Sinica, 2020, 40(10): 1014004
- Acta Optica Sinica
- Vol. 40, Issue 10, 1014004 (2020)
Fig. 1. Diagram of vector light field focusing
Fig. 2. Flow chart of vector G-S algorithm
Fig. 3. Comparison of results obtained by vector G-S algorithm and scalar G-S algorithm. (a)-(h) After 10 iterations; (i)-(l) after 100 iterations
Fig. 4. Uniformity of multifocal array as a function of number of iterations
Fig. 5. Schematic of femtosecond laser fabrication system based on spatial light modulator
Fig. 6. Relationship of line width with laser power and scanning speed. (a) Line widths under different laser powers when scanning speed is 2 mm·s-1; (b) line widths under different scanning speeds when laser power is 0.5 mW; line width as functions of (c) laser power or (d) scanning speed
Fig. 7. Experiment of parallel laser fabrication under different multifocal arrays
Fig. 8. Parallel laser fabrication experiment under multifocal array with arbitrary arrangement structure
Fig. 9. Experiment of “T”-pattern dynamic parallel laser fabrication. Phase pattern at (a) position 1 and (b) position 2; (c) simulated plot after all focal spots superimposed; (d) micrograph
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