[1] MAENAKA K. MEMS inertial sensors and their applications ［C］ // 5th Int Conf Network Sens Syst. Kanazawa, Japan. 2008: 71-73.
[3] LU J H, INEROWICZ M, JOO S, et al. A low-power, wide-dynamic-range semi-digital universal sensor readout circuit using pulsewidth modulation ［J］. IEEE Sensor J, 2011, 11(5): 1134-1144.
[5] RAZAVI B. Design of analog CMOS integrated circuits ［M］. New York: McGraw-Hill, 2001.
[6] NIZZA N, DEI M, BUTTI F, et al. A low-power interface for capacitive sensors with PWM output and intrinsic low pass characteristic ［J］. IEEE Trans Circ & Syst I: Regu Pap, 2013, 60(6): 1419-1431.
