Chuan SHEN, Yang-Rong LIU, Rui-Yun SUN, Shun-Dong BU, Lu CHEN, Li HE. The influence of Hg vacancy control of HgCdTe materials with different passivation layers through thermal annealing[J]. Journal of Infrared and Millimeter Waves, 2022, 41(2): 425
- Journal of Infrared and Millimeter Waves
- Vol. 41, Issue 2, 425 (2022)
Fig. 1. Cross section of HgCdTe with passivation layers
Fig. 2. Schematic diagram of thermal annealing under Hg pressure：A is HgCdTe sample，B is annealing source（With Hg），C is Quartz tube
Fig. 3. R0 of HgCdTe devices with different Hg concentration
Fig. 4. Cd composition of HgCdTe epitaxial materials with different passivation layers
Fig. 5. XRD rocking curves of sample A and sample B
Fig. 6. Hall concentration（77 K）of Sample B with different depth
Fig. 7. Hg concentration in the ZnTe passivation layer before and after annealing
Fig. 8. Hg concentration in the CdTe passivation layer before and after annealing
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Table 1. 77K Hg vacancy concentration of HgCdTe with different passivation layers after thermal annealing
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Table 2. Ea values of HgCdTe samples with different structures
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