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    Journals >Acta Optica Sinica >Volume 40 >Issue 15 >Page 1522002 > Article
    • Acta Optica Sinica
    • Vol. 40, Issue 15, 1522002 (2020)
    Design of Reflective Projection Optics Used in Lithographic Focusing and Leveling System
    Shengsheng Sun1、2、**, Dan Wang1, Yuejing Qi1、2, and Mingcheng Zong1、2、*
    Author Affiliations
  • 1Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.3788/AOS202040.1522002 Cite this Article Set citation alerts
    Shengsheng Sun, Dan Wang, Yuejing Qi, Mingcheng Zong. Design of Reflective Projection Optics Used in Lithographic Focusing and Leveling System[J]. Acta Optica Sinica, 2020, 40(15): 1522002 Copy Citation Text show less
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    Article index updated: May. 30, 2024
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    Shengsheng Sun, Dan Wang, Yuejing Qi, Mingcheng Zong. Design of Reflective Projection Optics Used in Lithographic Focusing and Leveling System[J]. Acta Optica Sinica, 2020, 40(15): 1522002
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    Paper Information
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