Fabrication of the high-Q Si3N4 microresonators for soliton microcombs

Shuai Wan; Rui Niu; Jin-Lan Peng; Jin Li; Guang-Can Guo; Chang-Ling Zou; Chun-Hua Dong

doi:10.3788/COL202220.032201

Journals >Chinese Optics Letters >Volume 20 >Issue 3 >Page 032201 > Article

Chinese Optics Letters
Vol. 20, Issue 3, 032201 (2022)

Q

Si₃N₄ microresonators for soliton microcombs

Shuai Wan^1、2, Rui Niu^1、2, Jin-Lan Peng³, Jin Li^1、2, Guang-Can Guo^1、2, Chang-Ling Zou^1、2, and Chun-Hua Dong^1、2、*

Author Affiliations

¹CAS Key Laboratory of Quantum Information, University of Science and Technology of China, Hefei 230026, China

²CAS Center For Excellence in Quantum Information and Quantum Physics, University of Science and Technology of China, Hefei 230026, China

³Center for Micro and Nanoscale Research and Fabrication, University of Science and Technology of China, Chinese Academy of Sciences, Hefei 230026, China

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DOI: 10.3788/COL202220.032201 Cite this Article Set citation alerts

Shuai Wan, Rui Niu, Jin-Lan Peng, Jin Li, Guang-Can Guo, Chang-Ling Zou, Chun-Hua Dong. Fabrication of the high-

Q

Si₃N₄ microresonators for soliton microcombs[J]. Chinese Optics Letters, 2022, 20(3): 032201 Copy Citation Text

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The article is cited by 8 article(s) from Web of Science.

Shuai Wan, Rui Niu, Jin-Lan Peng, Jin Li, Guang-Can Guo, Chang-Ling Zou, Chun-Hua Dong. Fabrication of the high-

Q

Si₃N₄ microresonators for soliton microcombs[J]. Chinese Optics Letters, 2022, 20(3): 032201

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