[2] Chivers K A. The challenge of extending optical lithography [C].SPIE,1999,3741: 48-58.
[3] Silverman P J. Extreme ultraviolet lithography: overview and development status [J].J. Microlith. Microfab.Microsystem,2005,4(1): 1-5.
[4] Michel B. An introduction to ultimate lithography [J].Physique,2006,7: 837-840.
[5] Jain K. Lithography and photoablation systems for microelectronics and optoelectronics: importance of laser beam shaping in system design [C].Proc. of SPIE,2002,4770: 1-12.
[6] Lizotte T. Beam shaping for micro via drilling,dicing and micro trimming [C].Proc. of SPIE,2003,5175: 149-159.
[7] Turunen J,Paakkonen P,et al. Diffractive shaping of excimer laser beams [J].J. of Modern Optics,2000,47(13):2467-2475.
[8] Arnold W H. Lithography strategies for 180 nm CMOS device fabrication [C].SPIE,1997,3096: 2-9.
[9] Jain K. Flexible electronics and displays: high-resolution,roll-to-roll,projection lithography and photoablation processing technologies for high-throughput production [J].Proc. of the IEEE,2005,93(8): 1500-1510.
[10] Jasper K,Scheede S,et al. Excimer laser beam homogenizer with low divergence [J].Appl. Phys. A,1999,69:315-318.
[12] Bernges J,Unnebrink L,et al. Novel design concepts for UV laser beam shaping [C].SPIE,1999,3779: 118-125.
[13] Kopp C,Ravel L,Meyrueis P. Efficient beamshaper homogenizer design combining diffractive optical elements,microlens array and random phase plate [J].J. Opt. A: Pure Appl. Opt.,1999,1: 398-403.
[14] Bollanti S,Dilazzaro P,et al. Edge steepness and plateau uniformity of a nearly flat-top shaped laser beam [J].Appl. Phys. B,2004,78: 195-198.
[15] Kajava T,Hakola A,et al. Flat-top profile of an excimer-laser beam generated using beam-splitter gratings [J].Opt. Commun.,2006,268: 289-293.
[18] Mann K,Hopfmuller A. Monitoring and shaping of excimer laser beam profiles [C].Proc. of SPIE,1992,1834:184-194.
[20] Sales T R M. Structured microlens arrays for beam shaping [C].Proc. of SPIE,2003,5175: 109-120.
[21] Harder I,Lano M,et al. Homogenization and beam shaping with microlens arrays [C].Proce. of SPIE,2004,5456: 99-107.
[25] Turunen J,Paakkonen P,et al. Diffractive shaping of excimer laser beams [J].Journal Of Modern Optic,2000,47(13): 2467-2475.