Heat accumulation effects in femtosecond laser-induced subwavelength periodic surface structures on silicon

Qiang Fu; Jing Qian; Guande Wang; Quanzhong Zhao

doi:10.3788/COL202321.051402

Journals >Chinese Optics Letters >Volume 21 >Issue 5 >Page 051402 > Article

Chinese Optics Letters
Vol. 21, Issue 5, 051402 (2023)

Heat accumulation effects in femtosecond laser-induced subwavelength periodic surface structures on silicon | Editors' Pick

Qiang Fu^1、2, Jing Qian^1、2, Guande Wang^1、2, and Quanzhong Zhao^1、2、*

Author Affiliations

¹State Key Laboratory of High Field Laser Physics and CAS Center for Excellence in Ultra-intense Laser Science, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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DOI: 10.3788/COL202321.051402 Cite this Article Set citation alerts

Qiang Fu, Jing Qian, Guande Wang, Quanzhong Zhao. Heat accumulation effects in femtosecond laser-induced subwavelength periodic surface structures on silicon[J]. Chinese Optics Letters, 2023, 21(5): 051402 Copy Citation Text

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